Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus, method for manufacturing thereof and method for manufacturing microdevice










Image Number 12 for United States Patent #6717651.

An exposure apparatus exposes a transfer pattern of a mask onto a photosensitive substrate in an overlapping manner. The exposure apparatus includes an illumination optical system for guiding illumination light to the mask. An imaging optical system in the illumination optical system forms an illumination area on the mask. The exposure apparatus includes a lens driving apparatus. The lens driving apparatus moves at least one of the lenses constituting the imaging optical system along the optical axis and so forth, thereby correcting an optical characteristic of the imaging optical system.








 
 
  Recently Added Patents
Method and system for determining an optimal missile intercept approach direction for correct remote sensor-to-seeker handover
Methods, systems, and products for providing ring backs
Recording medium, playback device, integrated circuit
Method for processing an algae medium containing algae microorganisms to produce algal oil and by-products
Water slide
Cathode active material and lithium secondary battery comprising the same
Systems, methods and computer program products supporting provision of web services using IMS
  Randomly Featured Patents
Phase comparator
Writing tool
Biodegradable chum container
Negative working image recording material
Semiconductor radiation source power monitor
Method and system to dynamically compensate for probe tip misalignement when testing integrated circuits
Aminoplast resin crosslinking agents and nitroalkanol used to treat cellulose
Transportable object and process of production
Precise rain gauge and methods of calibration
Membrane electrode assembly for a fuel cell