Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for dressing a polishing pad, polishing apparatus, and method for manufacturing a semiconductor apparatus










Image Number 7 for United States Patent #6716087.

A dresser is used which makes it possible to simultaneously dress and condition the surface of a polishing pad deteriorated by polishing a semiconductor wafer in the CMP process. The dresser is a dresser comprised of a ceramic such as dressing SiC, SiN, alumina or silica. Use of this dresser enables to shorten the time of dressing/conditioning the deteriorated polishing pad.








 
 
  Recently Added Patents
Mechanical signal processing accumulator attenuation device and method
Mesh serving tray
Memory device and method of fabricating the same
Iodized salt and a process for its preparation
Antineoplastic peptides
Bat caddy
Mobile terminal
  Randomly Featured Patents
Actuator control device
Programmable integrated circuit with voltage domains
Preventing simultaneous start of air conditioners during recovery from a power failure
Arrangement and method for forming an electrical contact in an electronic device
Detergent compositions inhibiting dye transfer
Multiple speed hub for a bicycle with centrifugally controlled speed change and override mechanism actuated by back pedaling
Operating method for an image-generating medical engineering assembly and articles associated herewith
Transfer labeling mechanism for multiple outstanding read requests on a split transaction bus
System and method for sequence-based subspace pattern clustering
Parts handling machine