Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Barrier layer associated with a conductor layer in damascene structures










Image Number 6 for United States Patent #6713875.

The present invention is directed to a simplified, CVD-less method of forming a barrier layer for a metal layer which prevents metal contamination in an integrated circuit. The invention utilizes a sacrificial multilayer dielectric structure and selective etching to form the top barrier layer. An opening is etched in the structure and a plating layer is deposited in the opening. A first unneeded portion of the structure along with an unneeded portion of the plating layer is removed utilizing an etchant that is selective for the first unneeded structural portion. A Cu layer is deposited and implanted with barrier material to form the top barrier layer. A second unneeded portion of the structure along with an unneeded portion of the top barrier layer is removed utilizing an etchant that is selective for the second unneeded structural portion. The resulting structure is a metal interconnect structure having an overlying top barrier layer which is produced without using CVD techniques.








 
 
  Recently Added Patents
Shape based similarity of continuous wave doppler images
Mounting structure, electro-optical apparatus, and touch panel
LO generation with deskewed input oscillator signal
Flat panel display
Method and apparatus for policy-based network access control with arbitrary network access control frameworks
Calibration method for non-ideal transceivers
Light fixture
  Randomly Featured Patents
Oxygen sensor
Semiconductor module
Semiconductor device and manufacturing method thereof
Opening system for folding baby carriage
Electrochemical cell and method of making an electrochemical cell
Compact storage of seat and coolness by phase change materials while preventing stratification
Rotary drill bit having improved mounting means for multiple cutting elements
Submarine cable joint with optoelectronic repeaters
Golf club head
Combined housings and handles for latches and locks