Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Barrier layer associated with a conductor layer in damascene structures










Image Number 6 for United States Patent #6713875.

The present invention is directed to a simplified, CVD-less method of forming a barrier layer for a metal layer which prevents metal contamination in an integrated circuit. The invention utilizes a sacrificial multilayer dielectric structure and selective etching to form the top barrier layer. An opening is etched in the structure and a plating layer is deposited in the opening. A first unneeded portion of the structure along with an unneeded portion of the plating layer is removed utilizing an etchant that is selective for the first unneeded structural portion. A Cu layer is deposited and implanted with barrier material to form the top barrier layer. A second unneeded portion of the structure along with an unneeded portion of the top barrier layer is removed utilizing an etchant that is selective for the second unneeded structural portion. The resulting structure is a metal interconnect structure having an overlying top barrier layer which is produced without using CVD techniques.








 
 
  Recently Added Patents
Philanthropy management apparatus, system, and methods of use and doing business
Extract of Vanilla planifolia
Encryption using alternate authentication key
Methods of producing the membranes and the uses of membranes as battery separator films
Simulation tool for air traffic communications security
Method for distributing advertisements to client devices using an obscured ad monitoring function
Egg separator
  Randomly Featured Patents
Optimized programming/erase parameters for programmable devices
Bus bridge architecture for a data processing system capable of sharing processing load among a plurality of devices
Method for enhancing the properties of a string used in a stringing device
Drive system employing frictionless bearings including superconducting matter
Electroviscous fluids
Group based spam classification
Thin-film transistor monolithically integrated with an organic light-emitting diode
Manufacuturing equipment for sanitary napkins with wings having no peeling-off paper strips
Fastener driving device with adjustable shoe
Laminated material