Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Barrier layer associated with a conductor layer in damascene structures










Image Number 6 for United States Patent #6713875.

The present invention is directed to a simplified, CVD-less method of forming a barrier layer for a metal layer which prevents metal contamination in an integrated circuit. The invention utilizes a sacrificial multilayer dielectric structure and selective etching to form the top barrier layer. An opening is etched in the structure and a plating layer is deposited in the opening. A first unneeded portion of the structure along with an unneeded portion of the plating layer is removed utilizing an etchant that is selective for the first unneeded structural portion. A Cu layer is deposited and implanted with barrier material to form the top barrier layer. A second unneeded portion of the structure along with an unneeded portion of the top barrier layer is removed utilizing an etchant that is selective for the second unneeded structural portion. The resulting structure is a metal interconnect structure having an overlying top barrier layer which is produced without using CVD techniques.








 
 
  Recently Added Patents
Image forming apparatus and information processing apparatus
Aisle barrier
Pharmaceutical treatment process using chitosan or derivative thereof
Wireless updating of hearing devices
Device and method for arranging vials
Electric vehicle supply equipment having a socket and a method of charging an electric vehicle
Feedback method and processing system for policy installation failures
  Randomly Featured Patents
Separation medium containing thermally exfoliated graphite oxide
Plural storage system
Process for producing cumene
Method for discarding corrupted data packets in a reliable transport fabric
Optical configurations for distributing radially collimated light
Traveling welding carriage
Offset crankshaft engine
In-situ stabilized compositions
Rendering multiple clear rectangles using a pre-rendered depth buffer
Combined swimming belt and tether