Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Use of scatterometry/reflectometry to measure thin film delamination during CMP










Image Number 6 for United States Patent #6702648.

One aspect of the present invention relates to a system and method for examining a wafer for delamination in real time while polishing the wafer. The system comprises a polishing system programmed to planarize one or more film layers formed on at least a portion of a semiconductor wafer surface; a real-time metrology system coupled to the polishing system such that the metrology system examines the layers as they are planarized; and one or more delamination sensors, wherein at least a portion of each sensor is integrated into the polishing system in order to provide data to the metrology system and wherein the sensor comprises at least one optical element to detect delamination during polishing. The method involves polishing at least a portion of an uppermost film layer and examining at least a portion of a layer underlying the uppermost film layer for delamination as the uppermost layer is being polished.








 
 
  Recently Added Patents
DL control channel structure enhancement
Luggage
Lateral flow test kit and method for detecting an analyte
Planarizing agents and devices
Anti-fake battery pack and identification system thereof
Method and apparatus for user selection of advertising combinations
System and method for wireless messaging in a wireless communication system
  Randomly Featured Patents
Drive-capable support or traction means and method for production thereof
Connecting element and helicopter rotor incorporating same
Preparation of phenoxybenzyl esters
Closure
Brazed diamond tools and methods for making
Decorative sheet material simulating the appearance of a base coat/clear coat paint finish
Zero insertion force connector and circuit card assembly
Non-contact measurement device for quickly and accurately obtaining dimensional measurement data
Apparatus having card holding mechanism
Tank