Resources Contact Us Home
Use of scatterometry/reflectometry to measure thin film delamination during CMP

Image Number 6 for United States Patent #6702648.

One aspect of the present invention relates to a system and method for examining a wafer for delamination in real time while polishing the wafer. The system comprises a polishing system programmed to planarize one or more film layers formed on at least a portion of a semiconductor wafer surface; a real-time metrology system coupled to the polishing system such that the metrology system examines the layers as they are planarized; and one or more delamination sensors, wherein at least a portion of each sensor is integrated into the polishing system in order to provide data to the metrology system and wherein the sensor comprises at least one optical element to detect delamination during polishing. The method involves polishing at least a portion of an uppermost film layer and examining at least a portion of a layer underlying the uppermost film layer for delamination as the uppermost layer is being polished.

  Recently Added Patents
Preparation of isomerically pure substituted cyclohexanols
Topical antibiotic composition for the prevention of Lyme disease
Apparatus for providing location information of hand-held device and method thereof
Systems and methods for providing power and data to lighting devices
High-accuracy centered fractional fourier transform matrix for optical imaging and other applications
Flexible organic light emitting device and manufacturing method thereof
  Randomly Featured Patents
Optical line termination, passive optical network, and method and apparatus for performance monitoring
Drug delivery system including holder and drug container
Trackless cargo bed organizer
Sleeve for the arm of a windshield wiper
Electrical contact
Ball elevation golf tee
Method and apparatus for operating digital static CMOS components in a very low voltage mode during power-down
Window molding members and method of manufacturing same
Cigar and cigarette ashtray
Insulating vinyl siding