Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Use of scatterometry/reflectometry to measure thin film delamination during CMP










Image Number 6 for United States Patent #6702648.

One aspect of the present invention relates to a system and method for examining a wafer for delamination in real time while polishing the wafer. The system comprises a polishing system programmed to planarize one or more film layers formed on at least a portion of a semiconductor wafer surface; a real-time metrology system coupled to the polishing system such that the metrology system examines the layers as they are planarized; and one or more delamination sensors, wherein at least a portion of each sensor is integrated into the polishing system in order to provide data to the metrology system and wherein the sensor comprises at least one optical element to detect delamination during polishing. The method involves polishing at least a portion of an uppermost film layer and examining at least a portion of a layer underlying the uppermost film layer for delamination as the uppermost layer is being polished.








 
 
  Recently Added Patents
Security system with call management functionality
Fishing lure
System for evaluating manufacturability of a casting design
Systems, methods, and devices for dynamic resource monitoring and allocation in a cluster system
Depth image encoding apparatus and depth image decoding apparatus using loop-filter, method and medium
Emergency communications system
Semiconductor laser
  Randomly Featured Patents
Method and apparatus for digital communications with multiparameter light fixtures
Resonant acoustic projector
Field emission display having modified anode stripe geometry
Short pants
System and method for using delayed enhancement magnetic resonance imaging and artificial intelligence to identify non-viable myocardial tissue
Tool storage apparatus
Activity control for a mobile station in a wireless communication system
LDMOS transistor
Hammock
Disc brake rotor mounting system