Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Use of scatterometry/reflectometry to measure thin film delamination during CMP










Image Number 6 for United States Patent #6702648.

One aspect of the present invention relates to a system and method for examining a wafer for delamination in real time while polishing the wafer. The system comprises a polishing system programmed to planarize one or more film layers formed on at least a portion of a semiconductor wafer surface; a real-time metrology system coupled to the polishing system such that the metrology system examines the layers as they are planarized; and one or more delamination sensors, wherein at least a portion of each sensor is integrated into the polishing system in order to provide data to the metrology system and wherein the sensor comprises at least one optical element to detect delamination during polishing. The method involves polishing at least a portion of an uppermost film layer and examining at least a portion of a layer underlying the uppermost film layer for delamination as the uppermost layer is being polished.








 
 
  Recently Added Patents
Modular connector for touch sensitive device
Method for conformal plasma immersed ion implantation assisted by atomic layer deposition
Display panel and gate driving circuit and driving method for gate driving circuit
Managing device functionality during predetermined conditions
Changing sound alerts during a messaging session
Biaxially oriented hydrolysis-stable polyester film comprising epoxidized fatty acid derivatives and a chain extender, and process for production thereof and use thereof
Method for spore detection
  Randomly Featured Patents
Modular building panels and method of constructing walls from the same
Electrical connector with a family seal, and family seal
Method for fabricating lateral double diffused metal oxide semiconductor (LDMOS) transistor
Top guide for fishing rod
Budgeting native resources in resource-constrained devices that employ a dynamic, garbage-collection based view architecture
Grapple and lift beams for high integrity containers for radioactive waste
Method and apparatus for a network independent short message delivery system
Grinding machine with a fireproof dust-collecting system
Nematic liquid crystals and method for production thereof
Decorative coil lights