Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser spectral engineering for lithographic process










Image Number 16 for United States Patent #6671294.

An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.








 
 
  Recently Added Patents
Factor IXa crystals, related complexes and methods
Warm air generating apparatus, sheet feeding apparatus, and image forming apparatus including warm air generating apparatus and sheet feeding apparatus
Method for designing sunlight-reflection and heat-radiation multilayer film
Power conversion device for electric vehicle
Stretchable elastic laminate having increased CD elongation zones and method of production
Integrated disk driving module including a stepping motor integrally formed with a base unit
Electronic product design
  Randomly Featured Patents
Non-corrosion photoresist stripping composition
Composite random access memory providing direct and auxiliary memory access
Exercise and game apparatus
Combinatorial preparation and testing of heterogeneous catalysts
Modified chess set and method of playing a modified game of chess
High-affinity oligonucleotide ligands to immunoglobulin E (IgE)
Device for sensing cardiac activity in an implantable medical device in the presence of magnetic resonance imaging interference
Ultra-high capacity removable media cartridge configured to prevent insertion in a conventional floppy disk drive
Gas purification
Farm motif slot machine