Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser spectral engineering for lithographic process










Image Number 16 for United States Patent #6671294.

An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.








 
 
  Recently Added Patents
Remote ignition system for a vehicle and method for securing a remote ignition function
Identification of websites that break out of frames
Tri-material dual-species neutron spectrometer
Point-of-sale server and method
Strongly bound carbon nanotube arrays directly grown on substrates and methods for production thereof
Segmenting video based on timestamps in comments
Optical multiplexer/demultiplexer
  Randomly Featured Patents
Attachment coupler for heavy machinery
360-.degree. image photographing apparatus
Reaginic test for syphilis
H-tap compression connector
Deutzia plant named `Kolmaspri`
Capacitor structure of semiconductor memory cell and method for fabricating capacitor structure of semiconductor memory cell
Cover for dispensing closure with pressure actuated valve
Method, apparatus, program, and recording medium for long-term prediction coding and long-term prediction decoding
Selective reduction of video data using variable sampling rates based on importance within the image
Infusion device filter