Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Laser spectral engineering for lithographic process










Image Number 16 for United States Patent #6671294.

An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.








 
 
  Recently Added Patents
Preventative traffic congestion social networking improvement system within a community
Providing a feedback loop in a low latency serial interconnect architecture
Adaptive take-off strips for smoothing ink consumption
Blended block copolymer composition
Image display device and method of changing first EDID with second EDID wherein the second EDID information is compatible with image display device
Power-on reset circuit
Method, system and computer program product for verifying floating point divide operation results
  Randomly Featured Patents
Shell making method and apparatus
Method of manufacturing trim cover assembly for vehicle seats
Verifying a trusted SMI handler
Method of manufacturing semiconductor device
Remote caller identification device
Hybridoma and monoclonal antibody specific for human stem cell factor receptor and methods of use of the monoclonal antibody for detection of stem cell factor receptors
Inflatable reactor vessel stud hole plug
Method and system for detecting vascular conditions using an occlusive arm cuff plethysmograph
Liquid storage container with closure cap
Kinematic coupling system for thin plates and sheets and the like