Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device having hetero grain stack gate










Image Number 7 for United States Patent #6667525.

A semiconductor device includes a hetero grain stack gate (HGSG). The device includes a semiconductor substrate having a surface, a gate insulating layer formed over the surface of the semiconductor substrate, and a gate electrode formed over the gate insulating layer, wherein the gate electrode includes a lower poly-SiGe layer having a columnar crystalline structure, and an upper poly-Si layer having a random crystalline structure. In one embodiment, the gate electrode includes a lower poly-SiGe layer having a columnar crystalline structure, an intermediate layer having an random crystalline structure, and an upper poly-Si layer having a columnar crystalline structure. A method of manufacturing a semiconductor device having an HGSG comprises depositing a gate insulating layer over a surface of a semiconductor substrate, depositing a lower poly-SiGe layer having a columnar crystalline structure over the gate insulating layer, depositing an amorphous Si layer over the lower poly-SiGe layer, and crystallizing the amorphous Si layer to obtain an upper poly-Si layer having a random crystalline structure.








 
 
  Recently Added Patents
5-HT.sub.3 receptor modulators, methods of making, and use thereof
Optical disc drive having a tray for loading a disc using supporting portions
Device and method for controlling brightness of organic light emitting diode display
Computer program and apparatus for evaluating signal propagation delays
Magnetic element with top shield coupled side shield lamination
Active and progressive targeted advertising
Position and orientation measurement apparatus, position and orientation measurement method, and storage medium
  Randomly Featured Patents
Anti-friction cam-operated friction disk clutch
Voltage control circuit and semiconductor device having the voltage control circuit
Tissue treatment dispenser
Plasma processing apparatus and method of processing substrates by using same apparatus
Change indication for a service offering
Photocatalytic coatings having improved low-maintenance properties
Method and apparatus for establishing an audio link to a wireless earpiece in reduced time
1-Aminomethyl-2,2-diaryl-cyclopropane carboxamides
Coke oven door lining
Battery pack