Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods for fabricating integrated circuit devices using antiparallel diodes to reduce damage during plasma processing










Image Number 7 for United States Patent #6664140.

An integrated circuit includes first and second diodes that are electrically connected to a conductive line in antiparallel, to dissipate both positive and negative charges on the conductive line during plasma processing. The integrated circuit also includes a fuse for disconnecting one of the first and second diodes from the conductive line after the plasma processing, to thereby allow conduction of one of positive and negative charge on the conductive line after the plasma processing. Accordingly, integrated circuits are fabricated by forming a conductive line on an integrated circuit substrate and first and second diodes in the integrated circuit substrate that are electrically connected to the conductive line in antiparallel. Then, plasma processing is performed on the integrated circuit substrate including the conductive line and the first and second diodes, such that the first and second diodes dissipate both positive and negative charges on the conductive line during the plasma processing. Then, one of the first and second diodes is disconnected from the conductive line after performing the plasma processing, to thereby allow conduction of one of positive and negative charge on the conductive line after performing the plasma processing.








 
 
  Recently Added Patents
Grip for a racket
Disk drive to enable defect margining
Method for processing an algae medium containing algae microorganisms to produce algal oil and by-products
Cardiac chamber volume computation from contours and base plane in cardiac MR Cine images
Extreme ultraviolet light generation apparatus
Subscribing to content
Vertical gate LDMOS device
  Randomly Featured Patents
Device for controlling lateral sheet contact and for interrupting sheet feed upon occurrence of faulty sheet contact
Method of chemically altering a silicon surface and associated electrical devices
Pipe coupling
Pet mobile
Combination substrate
Mask ROM cell structure with multi-level data selection by code
Electrosurgical generator
Non-contacting position sensor using a rotating magnetic vector
Camblock assembly for a firearm
Lead-free mixture as a radiation protection additive