Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming an oxide film










Image Number 9 for United States Patent #6586346.

A method of forming an oxide film and a method of manufacturing an electronic device utilizing the oxide film is disclosed. A silicon oxide film is formed on a substrate by sputtering. Therefore, the film formation is carried out at a low temperature. The sputtering atmosphere comprises an oxidizing gas and an inert gas such as argon. In order to prevent fixed electric charges from being generated in the film and to obtain an oxide film of good properties, the proportion of argon is adjusted to 20% or less. Alternatively, a gas including halogen elements such as fluorine is added to the above sputtering atmosphere at a proportion less than 20%. Hereupon, alkali ions and dangling bonds of silicon in the oxide film are neutralized by the halogen elements, whereby a fine oxide film is obtained.








 
 
  Recently Added Patents
Phospholipid-based powders for drug delivery
Processing biomass
Print processing method, print relay server, control method, and storage medium to reserve print data
Plants and seeds of corn variety CV092363
Digital watermark embedding apparatus, digital watermark embedding method, and digital watermark detection apparatus
Pixel interleaving configurations for use in high definition electronic sign displays
Apparatus and method for phase synchronization in radio frequency transmitters
  Randomly Featured Patents
Sport knife
Wire containment cap
Magnetic swing door lock
Compressed-air-powered immersible prime mover providing impulse propulsion to pool cleaners, trolling boats, and scuba divers
Quinazolinones
Rasterization system utilizing an overlay of bit-mapped low address resolution databases
Color conversion definition creating method, color conversion definition creating apparatus, and color conversion definition creating program storage medium
Nucleic acid vaccination for parvoviral infections
Electrosurgical apparatus and methods for treatment and removal of tissue
Pocket spring assembly and methods