Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of forming an oxide film










Image Number 9 for United States Patent #6586346.

A method of forming an oxide film and a method of manufacturing an electronic device utilizing the oxide film is disclosed. A silicon oxide film is formed on a substrate by sputtering. Therefore, the film formation is carried out at a low temperature. The sputtering atmosphere comprises an oxidizing gas and an inert gas such as argon. In order to prevent fixed electric charges from being generated in the film and to obtain an oxide film of good properties, the proportion of argon is adjusted to 20% or less. Alternatively, a gas including halogen elements such as fluorine is added to the above sputtering atmosphere at a proportion less than 20%. Hereupon, alkali ions and dangling bonds of silicon in the oxide film are neutralized by the halogen elements, whereby a fine oxide film is obtained.








 
 
  Recently Added Patents
Segmenting video based on timestamps in comments
Systems and methods for vehicle cruise control
Pizza stone
Method and computed tomography device and data storage medium for performing a dynamic CT examination on a patient
Method and device for managing a turning setpoint applied to at least one turning actuator for the rear wheels of an automobile
Method and apparatus for optimizing transmission diversity
Evaluating programmer efficiency in maintaining software systems
  Randomly Featured Patents
Test generator for database management systems
Dividable introducer catheter and positive-lock needle guard combination
Notification system and method for domain name registrars
Tool case
Electric switch
Ultrasonic applicator for ultrasonic scanning of bodies and method of using the same
Simulation based PSM clear defect repair method and system
Output pin for selectively outputting one of a plurality of signals internal to a semiconductor chip according to a programmable register for diagnostics
Shock absorbing assembly for an athletic shoe
Modified gain non-causal channel equalization using feed-forward and feedback compensation