Resources Contact Us Home
Method of polishing a layer comprising copper using an oxide inhibitor slurry

Image Number 3 for United States Patent #6566266.

A process for polishing a semiconductor body according to an embodiment of the present invention includes the steps of providing a semiconductor body, forming a barrier layer over a portion of the semiconductor body, and forming at least one layer including copper over a portion of the barrier layer. The process further includes the steps of polishing at least a portion of the layer including copper with a first polishing slurry composition and changing the polishing composition from the first slurry composition to a second polishing slurry composition. The process also includes the steps of polishing at least a portion of the layer including copper with the second slurry composition and polishing at least a portion of the barrier layer with the second slurry composition. Moreover, the second slurry composition includes an effective amount of a copper oxide inhibitor to substantially inhibit copper oxide formation. In an embodiment, the effective amount of the copper oxide inhibitor is between about 0.005% and 0.03% by weight of the second slurry composition. In another embodiment, the second slurry composition is different than the first slurry composition.

  Recently Added Patents
Determining ill conditioning in square linear system of equations
Multi-carrier operation for wireless systems
Functional component compensation reconfiguration system and method
Shield for vacuum circuit breaker
Process for filtering interferograms obtained from SAR images acquired on the same area
Vanilloid receptor ligands and use thereof for the production of pharmaceutical preparations
  Randomly Featured Patents
Device for distance measurement
Spectacle frame
Copy paper sheet separating device
Self-bonding syntactic foam insulated container sleeve
Derailleur cable detecting assembly for an electric-auxiliary bicycle
Hybrid bear-feline plush toy
Optical fiber connection assembly
Heating apparatus with multiple element array
System and method for connecting a call in a tandem architecture
Data valid detector circuit for Manchester encoded data