Resources Contact Us Home
Method of polishing a layer comprising copper using an oxide inhibitor slurry

Image Number 3 for United States Patent #6566266.

A process for polishing a semiconductor body according to an embodiment of the present invention includes the steps of providing a semiconductor body, forming a barrier layer over a portion of the semiconductor body, and forming at least one layer including copper over a portion of the barrier layer. The process further includes the steps of polishing at least a portion of the layer including copper with a first polishing slurry composition and changing the polishing composition from the first slurry composition to a second polishing slurry composition. The process also includes the steps of polishing at least a portion of the layer including copper with the second slurry composition and polishing at least a portion of the barrier layer with the second slurry composition. Moreover, the second slurry composition includes an effective amount of a copper oxide inhibitor to substantially inhibit copper oxide formation. In an embodiment, the effective amount of the copper oxide inhibitor is between about 0.005% and 0.03% by weight of the second slurry composition. In another embodiment, the second slurry composition is different than the first slurry composition.

  Recently Added Patents
Maize hybrid X08B748
Coating composition, and a process for producing the same
Semiconductor device including multi-chip
Semiconductor power amplifier
Determination of statistical upper bound for estimate of noise power spectral density
Methods of preventing and treating viral infections by inhibiting the deISGylation activity of OTU domain-containing viral proteins
Method for transferring inventory between virtual universes
  Randomly Featured Patents
Tubelet panel and method of and apparatus for manufacture thereof
Disk apparatus having traverse and spindle cam members and method of operating same
Footprint generating toy
Animal trap
Method to improve characteristics of PIN diode switches, attenuators, and limiters by control of nodal signal voltage amplitude
Organic light emitting display apparatus and method of manufacturing the same
Process for producing alkenyl aromatic foams using a combination of atmospheric and organic gases and foams produced thereby
Process for preparing adhesive using planetary extruder
Catering bowl
Method and apparatus for creating an open cell micro-environment for treating a substrate with an impingement spray