Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of polishing a layer comprising copper using an oxide inhibitor slurry










Image Number 3 for United States Patent #6566266.

A process for polishing a semiconductor body according to an embodiment of the present invention includes the steps of providing a semiconductor body, forming a barrier layer over a portion of the semiconductor body, and forming at least one layer including copper over a portion of the barrier layer. The process further includes the steps of polishing at least a portion of the layer including copper with a first polishing slurry composition and changing the polishing composition from the first slurry composition to a second polishing slurry composition. The process also includes the steps of polishing at least a portion of the layer including copper with the second slurry composition and polishing at least a portion of the barrier layer with the second slurry composition. Moreover, the second slurry composition includes an effective amount of a copper oxide inhibitor to substantially inhibit copper oxide formation. In an embodiment, the effective amount of the copper oxide inhibitor is between about 0.005% and 0.03% by weight of the second slurry composition. In another embodiment, the second slurry composition is different than the first slurry composition.








 
 
  Recently Added Patents
Multi-user remote health monitoring system with biometrics support
Accordion bioreactor
Defensin polynucleotides and methods of use
Categorization of design rule errors
Electronic apparatus and manufacturing method of electronic apparatus
Method and systems for detecting duplicate travel path
Flash memory apparatus and method for generating read voltage thereof
  Randomly Featured Patents
Apparatus for the production of synthetic-resin bodies having core and skin of different density
Biological treatment of spent caustics
Ink feeder for a lithographic press
Pet and baby toilet seat
Toner storage unit, residual toner collect unit, toner container with these units and image forming apparatus with such toner container
Static eliminator and electric discharge module
Connector device for electric circuit
Thyristor with voltage breakover current control separated from main emitter by current limit region
Method for removing chrome and/or nickel from liquid slags
Alarm-triggering locking device for the catch and/or hinge region of a door or window to be protected