Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of polishing a layer comprising copper using an oxide inhibitor slurry










Image Number 3 for United States Patent #6566266.

A process for polishing a semiconductor body according to an embodiment of the present invention includes the steps of providing a semiconductor body, forming a barrier layer over a portion of the semiconductor body, and forming at least one layer including copper over a portion of the barrier layer. The process further includes the steps of polishing at least a portion of the layer including copper with a first polishing slurry composition and changing the polishing composition from the first slurry composition to a second polishing slurry composition. The process also includes the steps of polishing at least a portion of the layer including copper with the second slurry composition and polishing at least a portion of the barrier layer with the second slurry composition. Moreover, the second slurry composition includes an effective amount of a copper oxide inhibitor to substantially inhibit copper oxide formation. In an embodiment, the effective amount of the copper oxide inhibitor is between about 0.005% and 0.03% by weight of the second slurry composition. In another embodiment, the second slurry composition is different than the first slurry composition.








 
 
  Recently Added Patents
Toilet
Managing device functionality during predetermined conditions
Cytokine biomarkers as predictive biomarkers of clinical response for Glatiramer acetate
Light-emitting element, light-emitting device, and electronic device
Cross-linkable compositions
Termite tubing preventative for non-wood materials
Process to increase selectivity to ethylene in oxygenates-to-olefins conversions
  Randomly Featured Patents
Method of making weakening lines in sheet metal
Method and apparatus for generating halftone image with halftone dot rate correction
Methods and systems for predicting water vessel motion
Lens changer for cameras
Monitoring method and optoelectronic sensor
Heavy oil hydrocracking process with multimetallic liquid catalyst in slurry bed
Control box mounting bracket
Hand-held power tool
Erythromycins and process for their preparation
Method for engraving three dimensional images