Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of polishing a layer comprising copper using an oxide inhibitor slurry










Image Number 3 for United States Patent #6566266.

A process for polishing a semiconductor body according to an embodiment of the present invention includes the steps of providing a semiconductor body, forming a barrier layer over a portion of the semiconductor body, and forming at least one layer including copper over a portion of the barrier layer. The process further includes the steps of polishing at least a portion of the layer including copper with a first polishing slurry composition and changing the polishing composition from the first slurry composition to a second polishing slurry composition. The process also includes the steps of polishing at least a portion of the layer including copper with the second slurry composition and polishing at least a portion of the barrier layer with the second slurry composition. Moreover, the second slurry composition includes an effective amount of a copper oxide inhibitor to substantially inhibit copper oxide formation. In an embodiment, the effective amount of the copper oxide inhibitor is between about 0.005% and 0.03% by weight of the second slurry composition. In another embodiment, the second slurry composition is different than the first slurry composition.








 
 
  Recently Added Patents
Method and apparatus for compensating QoS during handover by base station in wireless broadband access system
Round carrying case
Method of stimulating tissue healing
Methods and systems for time-shifting content
Domain isolation through virtual network machines
Image processing apparatus and method configured to calculate defocus amount of designated area
Adaptive period network session reservation
  Randomly Featured Patents
Flash mounting means for camera with folding viewfinder
Cover for a food container
Adjustable shotgun stock
Light scattering particle size distribution measuring apparatus and method of use
Image pickup apparatus
Process for the preparation of 17-N-substituted-carbamoyl-4-aza-androst-1-en-3-ones
Atomic maser with cylindrical sapphire storage bulb
Pressure sensor including a diaphragm having a protective layer thereon
Generation of a configuration patch for network devices
Clip for mounting folder hanging rails in a drawer