Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of polishing a layer comprising copper using an oxide inhibitor slurry










Image Number 3 for United States Patent #6566266.

A process for polishing a semiconductor body according to an embodiment of the present invention includes the steps of providing a semiconductor body, forming a barrier layer over a portion of the semiconductor body, and forming at least one layer including copper over a portion of the barrier layer. The process further includes the steps of polishing at least a portion of the layer including copper with a first polishing slurry composition and changing the polishing composition from the first slurry composition to a second polishing slurry composition. The process also includes the steps of polishing at least a portion of the layer including copper with the second slurry composition and polishing at least a portion of the barrier layer with the second slurry composition. Moreover, the second slurry composition includes an effective amount of a copper oxide inhibitor to substantially inhibit copper oxide formation. In an embodiment, the effective amount of the copper oxide inhibitor is between about 0.005% and 0.03% by weight of the second slurry composition. In another embodiment, the second slurry composition is different than the first slurry composition.








 
 
  Recently Added Patents
Systems and/or methods for using air/wind power to charge/re-charge vehicle batteries
Method and device for reliable estimation of network traffic
Glass or glass-ceramic pane reflecting infrared radiation
Probiotic enriched and low organic acid food products
Techniques for data assignment from an external distributed file system to a database management system
Lithographic apparatus and device manufacturing method
Electric rotating machine for vehicle
  Randomly Featured Patents
Refillable container with depressurization means
Unipolar chamber for ionization smoke detector
Gold club head
Method for correcting disturbances in a level sensor light path
Completely coutercurrent cook continuous digester
Vane diffuser
Bisulfite terminated oligomers as dispersing agents
Organic carbonate plasticized polycarbonate composition
Mixed catalyst compositions for the production of polyolefins
Handbag