Resources Contact Us Home
Integrated capacitor bottom electrode for use with conformal dielectric

Image Number 4 for United States Patent #6555432.

Disclosed is a capacitor construction for a more uniformly thick capacitor dielectric layer, and a method for fabricating the same. The method has special utility where the bottom electrode comprises composite layers over which the capacitor dielectric demonstrates differential growth during deposition. Exposed portions of an underlying first electrode layer, are covered either by a conductive or dielectric spacer, or by a dielectric padding. For the preferred embodiments, in which the bottom electrode comprises titanium carbonitride over rough polysilicon, a dielectric padding may be formed during a rapid thermal nitridation step, which causes silicon nitride to grow out of an exposed polysilicon sidewall. Alternatively, a sidewall spacer may be formed by deposition an additional layer of titanium nitride over the original titanim nitride strap, and performing a spacer etch.

  Recently Added Patents
Account and customer creation in an on-line banking model
Method and apparatus for communications
Systems and methods for sorting particles
Engineered nucleic acids encoding a modified erythropoietin and their expression
Measuring apparatus for measuring a physical property of a sample
Author signatures for legal purposes
Method and system for using personal devices for authentication and service access at service outlets
  Randomly Featured Patents
Surgical stapler
Lock bracket
Ultrasonic depth gauge for liquids under high pressure
Alleviation of the allergenic potential of airborne and contact allergens by thioredoxin
Holey fiber and method of manufacturing the same
Viscoelastic fluid display
Short fiber feed system for sliver high pile fabric knitting machines
System and method for providing Wi-Fi access to electronic devices in a personal area network (PAN)
Method for cleaning, distributing and aerating grain
Process for the preparation of 2-oxa-bicyclo [3.3.0] octane derivatives and products produced thereby