Resources Contact Us Home
Integrated capacitor bottom electrode for use with conformal dielectric

Image Number 4 for United States Patent #6555432.

Disclosed is a capacitor construction for a more uniformly thick capacitor dielectric layer, and a method for fabricating the same. The method has special utility where the bottom electrode comprises composite layers over which the capacitor dielectric demonstrates differential growth during deposition. Exposed portions of an underlying first electrode layer, are covered either by a conductive or dielectric spacer, or by a dielectric padding. For the preferred embodiments, in which the bottom electrode comprises titanium carbonitride over rough polysilicon, a dielectric padding may be formed during a rapid thermal nitridation step, which causes silicon nitride to grow out of an exposed polysilicon sidewall. Alternatively, a sidewall spacer may be formed by deposition an additional layer of titanium nitride over the original titanim nitride strap, and performing a spacer etch.

  Recently Added Patents
Variable delay line for delay locked loop
Image scanner and image forming apparatus
Catalyst and process of hydrocarbon feedstock reformation to hydrogen and carbon monoxide
Light emitting device and electronic device
Semiconductor device and manufacturing method thereof
Processing abstract derived entities defined in a data abstraction model
Cis-alkoxy-substituted spirocyclic 1-H-pyrrolidine-2,4-dione derivatives
  Randomly Featured Patents
Dynamic system scheduling
Encoder strip damage detector
Swirl gun for powder particles
Retaining ring with shaped surface
Quick coupling cue stick
Single-crystal optical element having flat light-transmitting end surface inclined relative to cleavage plane
Polyketone polymer blends of a linear alternating polymer of carbon monoxide and at least one ethylenically unsaturated hydrocarbon with an amorphous polyamide
Liquid inks using a controlled crystallinity organosol
Parallel processing system by OS for single processor
Structure for detachable coupling of containers