Resources Contact Us Home
Integrated capacitor bottom electrode for use with conformal dielectric

Image Number 4 for United States Patent #6555432.

Disclosed is a capacitor construction for a more uniformly thick capacitor dielectric layer, and a method for fabricating the same. The method has special utility where the bottom electrode comprises composite layers over which the capacitor dielectric demonstrates differential growth during deposition. Exposed portions of an underlying first electrode layer, are covered either by a conductive or dielectric spacer, or by a dielectric padding. For the preferred embodiments, in which the bottom electrode comprises titanium carbonitride over rough polysilicon, a dielectric padding may be formed during a rapid thermal nitridation step, which causes silicon nitride to grow out of an exposed polysilicon sidewall. Alternatively, a sidewall spacer may be formed by deposition an additional layer of titanium nitride over the original titanim nitride strap, and performing a spacer etch.

  Recently Added Patents
System and method for evaluating equipment rack cooling performance
Method and an apparatus for processing an audio signal
Optoelectronic component and method for producing an optoelectronic component
Silicon-on-insulator (SOI) structure configured for reduced harmonics and method of forming the structure
Scanning projection apparatus with tangential compensation
Synchronization processing circuit and synchronization processing method in wireless communication system
System and method for configuring software applications in a motor vehicle
  Randomly Featured Patents
Cache-conscious concurrency control scheme for database systems
Compositions for improving RNase cleavage of base pair mismatches in double-stranded nucleic acids
Liquid distributor for packed columns
Memory write-in control system for color graphic display
Printed TFT array
Microwave devices for medical hyperthermia, thermotherapy and diagnosis
System and method of managing supplementary features in the presence of a proxy switch in a mobile communications network
Method and device for the radio-frequency connection of active subsections of a radio-frequency transmission system
Pharmaceutical formulations containing darifenacin
NXN light matrix switch