Resources Contact Us Home
Integrated capacitor bottom electrode for use with conformal dielectric

Image Number 4 for United States Patent #6555432.

Disclosed is a capacitor construction for a more uniformly thick capacitor dielectric layer, and a method for fabricating the same. The method has special utility where the bottom electrode comprises composite layers over which the capacitor dielectric demonstrates differential growth during deposition. Exposed portions of an underlying first electrode layer, are covered either by a conductive or dielectric spacer, or by a dielectric padding. For the preferred embodiments, in which the bottom electrode comprises titanium carbonitride over rough polysilicon, a dielectric padding may be formed during a rapid thermal nitridation step, which causes silicon nitride to grow out of an exposed polysilicon sidewall. Alternatively, a sidewall spacer may be formed by deposition an additional layer of titanium nitride over the original titanim nitride strap, and performing a spacer etch.

  Recently Added Patents
Method and apparatus for transcoding and transrating in distributed video systems
Network traffic demotion
Method and device for surface scanning of a patient
Delay lines, amplifier systems, transconductance compensating systems and methods of compensating
Systems and methods for selective text to speech synthesis
Spatially pre-processed target-to-jammer ratio weighted filter and method thereof
Mobile terminal based on W-CDMA system having receive diversity function and system thereof
  Randomly Featured Patents
Multi-phase interleaving isolated DC/DC converter
Method and apparatus for determining the mass of an article using a load cell
Surface finishing apparatus
Emission control apparatus for internal combustion engine
Process and system for producing multicomponent spunbonded nonwoven fabrics
Laser adjustable capacitor and fabrication process
Guide rail arrangement for elevators
Computer-aided transcription system using pronounceable substitute text with a common cross-reference library
Catching surface seal and rotating trunk for a continuous tree chop harvester
Active vacuum cleaner nozzle