Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Integrated capacitor bottom electrode for use with conformal dielectric










Image Number 4 for United States Patent #6555432.

Disclosed is a capacitor construction for a more uniformly thick capacitor dielectric layer, and a method for fabricating the same. The method has special utility where the bottom electrode comprises composite layers over which the capacitor dielectric demonstrates differential growth during deposition. Exposed portions of an underlying first electrode layer, are covered either by a conductive or dielectric spacer, or by a dielectric padding. For the preferred embodiments, in which the bottom electrode comprises titanium carbonitride over rough polysilicon, a dielectric padding may be formed during a rapid thermal nitridation step, which causes silicon nitride to grow out of an exposed polysilicon sidewall. Alternatively, a sidewall spacer may be formed by deposition an additional layer of titanium nitride over the original titanim nitride strap, and performing a spacer etch.








 
 
  Recently Added Patents
Lubricant coating device and image forming apparatus
Implant for performance enhancement of selected transistors in an integrated circuit
Interactivity model for shared feedback on mobile devices
Moving picture decoding device and moving picture decoding method
Reframing circuitry with virtual container drop and insert functionality to support circuit emulation protocols
Asynchronous task execution
Sensor apparatus and information processing apparatus
  Randomly Featured Patents
Photographic material comprising a combination of couplers forming washout and non-washout dyes
Method for checking printability of a lithography target
Phase lock loop system including a primary phase lock loop apparatus and a high order phase lock loop apparatus
Extruded frame member for structural connection and method of forming same
Method for contacting semiconductor components with a test contact
Equalizer for radio receive signal
Sub-micron surface plasmon resonance sensor systems
Ink jet writing head with spacer in capillary chamber
Removable tube connectors gas tight at high temperatures, tube connection process and usage
Non-aqueous lithium ion secondary battery