Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of etching insulative materials, of forming electrical devices, and of forming capacitors










Image Number 3 for United States Patent #6528429.

In one aspect, the invention encompasses a method of etching insulative materials which comprise complexes of metal and oxygen. The insulative materials are exposed to physical etching conditions within a reaction chamber and in the presence of at least one oxygen-containing gas. In another aspect, the invention encompasses a method of forming a capacitor. An electrically conductive first layer is formed over a substrate, and a second layer is formed over the first layer. The second layer is a dielectric layer and comprises a complex of metal and oxygen. A conductive third layer is formed over the second layer. The first, second and third layers are patterned into a capacitor construction. The patterning of the second layer comprises exposing the second layer to at least one oxygen-containing gas while also exposing the second layer to physical etching conditions.








 
 
  Recently Added Patents
Vehicle detection apparatus and method using magnetic sensor
Pyridyldiamido transition metal complexes, production and use thereof
Systems, methods, and media for firewall control via remote system information
Method for configuring analog-to-digital converter keys and non-transitory machine readable medium storing program code executed for performing such method
Electronic component and reflected-wave cancelling method
Input system including position-detecting device
Extreme ultraviolet light generation apparatus
  Randomly Featured Patents
Polymerizable emulsions for tissue engineering
System, methods and apparatus for managing a weapon system
Internally coated tubular system
Wireless GPS apparatus with integral antenna device
Antimicrobial substrate
Plastic container for food products
Video cassette rewinder
Human soluble immune response suppressor
Demodulation process for binary data
Catalytic or non-catalytic processes with enriched oxygen as a reactant