Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of transferring substrates with two different substrate holding end effectors










Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.








 
 
  Recently Added Patents
Method and apparatus for displaying system status with a wide range of viewing angle
Disk-based storage device having read channel memory that is selectively accessible to disk controller
Sock
Image processing apparatus and image processing method
Subpixel-based image down-sampling
Lighting control device and lighting control method
Method and device for managing a turning setpoint applied to at least one turning actuator for the rear wheels of an automobile
  Randomly Featured Patents
Open loop timing control for synchronous CDA systems
Educational board game
Display monitor
Pipeline fluid travel monitoring system
Enhanced selectivity of zeolites by controlled carbon deposition
Interactive communication system for communicating video game and karaoke software
Picking-up device for photographic film sheets
Process for producing flat heat exchange tubes
Flash spinning polymethylpentene process and product
Process for the catalytic conversion of organic chlorine compounds