Resources Contact Us Home
Method of transferring substrates with two different substrate holding end effectors

Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.

  Recently Added Patents
Pharmaceutical and diagnostic compositions for use in the treatment and diagnosis of neurodegenerative diseases or amyloid diseases
Customizing a range of acceptable tape dimensional stability write conditions
Scanned image projection system employing intermediate image plane
Stabilization of dicarbonate diesters with protonic acids
Face recognition through face building from two or more partial face images from the same face
Resolution setting apparatus, resolution setting method, and recording medium recording a resolution setting program when a television is used as a monitor of a computer
Nanowire structured photodiode with a surrounding epitaxially grown P or N layer
  Randomly Featured Patents
Channel configuration program server architecture
Gear train for interconnecting side-by-side positioned drums, rolls, wheels, etc.
Trig making tools
Fuel cutoff apparatus for engine-driven vehicle
High alkalinity sulfurized alkylphenates of alkaline earth metals and method of making same
Human monoclonal antibody to glycoprotein GPIII of varicella zoster virus
Variable valve lift apparatus
Wide viewing angle driving circuit and method for liquid crystal display
Ceratostigma plant named `My Love`
Derivatives of quinoline-8-carboxylic acid having pesticidal action