Resources Contact Us Home
Method of transferring substrates with two different substrate holding end effectors

Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.

  Recently Added Patents
Soft-input generation for soft-decision FEC decoding
System for interfacing between a terminal and a smart card, method for same, and smart card applied to same
Transvenous method to induce respiration
Automated tuning in a virtual machine computing environment
System and method for indirect interface monitoring and plumb-lining
Non-browning apple, method for producing the same, and drink and food using the same
Reducing power consumption on multi-transmitter devices
  Randomly Featured Patents
Novel cyclopropane carboxylic acid esters
Display stand for Christmas decorations and the like
Method of detecting voice activity in a signal, and a voice signal coder including a device for implementing the method
Apparatus for the contactless coupling of a suspended part to force measuring device
Non-aqueous detergent composition
Device and method to minimize data latency and maximize data throughput using multiple data valid signals
Gas panel with improved drive circuits
Secure document reader and method therefor
System and method for enhanced vertical resolution magnetic resonance imaging logs