Resources Contact Us Home
Method of transferring substrates with two different substrate holding end effectors

Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.

  Recently Added Patents
Performance monitoring of advanced process control systems
Nonvolatile semiconductor memory device and method for manufacturing the same
Antimicrobial flush solutions
Integrated testing circuitry for high-frequency receiver integrated circuits
Methods and systems for optimizing data accesses
Power-saving receiver
Substantially aligned boron nitride nano-element arrays and methods for their use and preparation
  Randomly Featured Patents
Methods for manufacturing liquid ejecting head and piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and piezoelectric element
Hollow flame versatile burner for hydrocarbons
Waveguide for an acoustic charge transport device
Surge reduction bypass valve
Bite device used with a panorama X-ray device
Polysilicon thin film process
Electrostatic discharge protection device
Menu for a display screen
Disposable liquid absorbing cleaning pad for a hand held cleaning implement having an elongated handle
DHT-based distributed file system for simultaneous use by millions of frequently disconnected, world-wide users