Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method of transferring substrates with two different substrate holding end effectors










Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.








 
 
  Recently Added Patents
Polymers
Semiconductor device and manufacturing method thereof
Touchscreen with extended conductive pattern
Image sorting device, method, program, and integrated circuit and storage medium storing said program
Method and system for determining a suppression factor of a suppression system and a lithographic apparatus
Tool bag with removable tool wall
Method for detecting directions of regularity in a two-dimensional image
  Randomly Featured Patents
Process for conditioning metal surfaces
Method to reduce carbon brake wear through residual brake force
Thin film transistor array substrate for a display panel and a method for manufacturing a thin film transistor array substrate for a display panel
Electronic control unit having user breakable function
Container
Holder for RCs, schedule guide, and magazine employs transparent rigid sheets and temporary fasteners
Remote control system for electric apparatus
Interlayer for laminated glass and laminated glass
Valve frame
Method and apparatus for regenerating a modified duobinary signal