Resources Contact Us Home
Method of transferring substrates with two different substrate holding end effectors

Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.

  Recently Added Patents
Medicament container
System, method, and computer program product for determining whether an electronic mail message is compliant with an etiquette policy
Systems and methods for redox flow battery scalable modular reactant storage
Electric separator, method for the production and use thereof
Method of using N-thio compounds for oligonucleotide synthesis
Case for electronic device
  Randomly Featured Patents
Method of manufacturing the outer retainer of a one way clutch that includes windows, by placing the outer retainer into a die and punching out slits in the outer retainer using a thin punch
Instrument for use in a joint replacement procedure
Scene setting control for two light groups
Clutch disc with balancing rivets
Quick-release tool assembly
Connecting device for peripheral equipment of an electronic computer
Liquid crystal display device having spacer provided in red pixel(s)
Solenoid valve
Substituted diones as intermediates for a process for the manufacture of .gamma.-pyrones
Venetian blind, sunlight and privacy