Resources Contact Us Home
Method of transferring substrates with two different substrate holding end effectors

Image Number 7 for United States Patent #6481956.

A method of transferring semi-conductor substrates from a first location to a second location. The first and second locations are adapted to hold a plurality of the substrates in individual support area. The method comprises use of a transfer mechanism with two substrate holding end effectors which each have support areas adapted to individually support different maximum numbers of substrates thereon. The substrates are transferred from the first location to the second location with the first end effector and, when empty individual support areas in the second location or substrates at the first location are less than the maximum number of support areas on the first end effector, transferring substrates from the first location to the second location with use of the second end effector.

  Recently Added Patents
Transcription factor
Method, system and computer program product for verifying floating point divide operation results
Automated hotfix handling model
Real-image zoom viewfinder and imaging apparatus
Hot-press cushion material and manufacturing method of the same
Authenticated secret sharing
Device and method including a soldering process
  Randomly Featured Patents
Expression vector systems and method of use
Integrated circuit with silicon contact to silicide
Color enhancing filter and method of employing a color enhancing filter to improve human eye vision
Method and apparatus for arbitrating for a bus to enable split transaction bus protocols
Photoelectric converting device
Small object identifying device and its identifying method
Fluid seal for endoscope
Chip size package
Method and device for the baseband process of the space-time/space-frequency/spatial diversity transmitter
Echinacea purpurea plant named `Raspberry Tart`