Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
High-purity copper sputtering targets and thin films










Image Number 2 for United States Patent #6451135.

There is provided copper targets for sputtering capable of forming a deposition film with low electric resistance indispensable for high-speed operation elements and also with excellent thickness uniformity, and such thin copper films. A high-purity copper sputtering target is characterized by comprising up to 0.1 ppm each Na and K, up to 1 ppm each Fe, Ni, Cr, Al, Ca, Mg, up to 5 ppm each carbon and oxygen, up to 1 ppb each U and Th, and, excluding gaseous constituents, more than 99.999% copper. Preferably the average grain size on the sputter surface is 250 .mu.m or below, with its dispersion thin plus or minus 20%. I(111)/I(200) of X-ray diffraction peak intensity on the sputter plane is at least 2.4 with its dispersion within plus or minus 20%.








 
 
  Recently Added Patents
Anti-proliferative and anti-inflammatory agent combination for treatment of vascular disorders with an implantable medical device
Barrier layers comprising Ni-inclusive ternary alloys, coated articles including barrier layers, and methods of making the same
Apparatus and method for exerting force on a subject tissue
Media identification system with fingerprint database balanced according to search loads
Method and system for filtering noises in an image scanned by charged particles
Transferring data by touch between touch-screen devices
Dental plier
  Randomly Featured Patents
IR transmitter with integral magnetic-stripe ATM type credit card reader and method therefor
System and method for transparent disk encryption
Vaccine for protection against Shigella sonnei disease
Mechanical clamp controlling
Method and apparatus for resource allocation and scheduling
Single-lens optical pick-up head for accessing a DVD disc and a CD disc by switching between two optical states
Process for preparing an identification card
Seal ring
Accelerated carburizing method with discrete atmospheres
Master three-phase induction motor with satellite three-phase motors driven by a single-phase supply