Resources Contact Us Home
Method for fabrication of high inductance inductors and related structure

Image Number 5 for United States Patent #6417755.

According to various embodiments, a conductor is patterned in a dielectric. The conductor can be patterned, for example, in the shape of a square spiral. The conductor can comprise, for example, copper, aluminum, or copper-aluminum alloy. The dielectric can be, for example, silicon oxide or a low-k dielectric. Trenches are etched next to the patterned conductor in the dielectric. The trenches are filled with a material having a permeability substantially higher than the permeability of the dielectric. The high permeability material can be, for example, nickel, iron, nickel-iron alloy, or magnetic oxide. As a result, an inductor having a high inductance value is achieved without lowering the quality factor of the inductor.

  Recently Added Patents
5-HT.sub.3 receptor modulators, methods of making, and use thereof
Image sensor pixels with junction gate photodiodes
Down-drawable, chemically strengthened glass for cover plate
Image sorting device, method, program, and integrated circuit and storage medium storing said program
Systems and methods for generating customized user interfaces
System, method and computer program product for efficient caching of hierarchical items
Epilation apparatus
  Randomly Featured Patents
Flow lock bead control apparatus and method for drawing high strength steel
Thermal body
Air conveyor components
Programmable logic arrays with each array column divided into a plurality of series connections of FETs
Multi-panel display device and method of driving the same
Board game having triangular playing spaces
Method and system for increasing optical instrument calibration and prediction accuracy within and across different optical instrument platforms
Mode changeover control system for transmission in motorcycle
Rigid paperboard container
Network relaying apparatus and network relaying method capable of high quality transfer of packets under stable service quality control