Resources Contact Us Home
Heat treatment device of the light irradiation type

Image Number 2 for United States Patent #6414279.

A heat treatment device of the light irradiation type with a long service life, in which effective, adequate cooling of the lamps (10) prevents devitrification of the lamp emission portion, even if the power supplied to the lamps is increased to accelerate the temperature increase of the wafer, is achieved by the provision of air injection lines (14) in a mirror (11), in which the lamps are mounted, for blowing in air into the vicinity of the lamps (10), and at least one air exhaust line (23) for evacuation of air from the vicinity of the lamps (10).

  Recently Added Patents
Apparatus and method to reduce noise in magnetic resonance imaging systems
Front cover of an electronic device
Process and intermediates for preparing lapatinib
Method and system for filtering noises in an image scanned by charged particles
Label printer
Semiconductor device
Halogen-free flame retardants for epoxy resin systems
  Randomly Featured Patents
Ink transfer member
Tool for cracking ice and frost
Hose or pipe coupling
Wireless headset
Method for forming deposited film
Ramjet engine equipped with a plurality of carburated air supply nozzles and a missile equipped with such a ramjet engine
Firearm having nonmetallic components and an ambidextrous cylinder release lever
Acoustic isolator having a high impedance layer of hafnium oxide
Structure for supporting seat of height-adjustment chair
Acidic multimetallic catalytic composite