Resources Contact Us Home
Heat treatment device of the light irradiation type

Image Number 2 for United States Patent #6414279.

A heat treatment device of the light irradiation type with a long service life, in which effective, adequate cooling of the lamps (10) prevents devitrification of the lamp emission portion, even if the power supplied to the lamps is increased to accelerate the temperature increase of the wafer, is achieved by the provision of air injection lines (14) in a mirror (11), in which the lamps are mounted, for blowing in air into the vicinity of the lamps (10), and at least one air exhaust line (23) for evacuation of air from the vicinity of the lamps (10).

  Recently Added Patents
Method for reserving network bandwidth for versioned network services
AC/DC converter
Materials for organic electroluminescent devices containing substituted 10-benzo[c]phenanthrenes
Manufacturing method power semiconductor device
Oil extractor and the preparation method thereof
Image processing unit, image processing method and program
Semiconductor IC including pulse generation logic circuit
  Randomly Featured Patents
Polishing method and apparatus
Oxygen delivery, oxygen detection, carbon dioxide monitoring (ODODAC) apparatus and method
Plow with adjustable moldboard
Racing helmet hitch ball cover
Apparatus for cutting and excavating solids
Bowed corner protectors for picture frames
Hybrid device for cell therapies
Polymer stabilization alignment liquid crystal display panel and liquid crystal display panel
Method of modulating and demodulating digital data and digital data modulator/demodulator
Thrust piston pump with double valve assembly