Resources Contact Us Home
Heat treatment device of the light irradiation type

Image Number 2 for United States Patent #6414279.

A heat treatment device of the light irradiation type with a long service life, in which effective, adequate cooling of the lamps (10) prevents devitrification of the lamp emission portion, even if the power supplied to the lamps is increased to accelerate the temperature increase of the wafer, is achieved by the provision of air injection lines (14) in a mirror (11), in which the lamps are mounted, for blowing in air into the vicinity of the lamps (10), and at least one air exhaust line (23) for evacuation of air from the vicinity of the lamps (10).

  Recently Added Patents
Digital photographing apparatus and control method for evaluating validity of an auto-focus operation
Illumination apparatus
Quantitative oxygen imaging systems and methods using echo-based single point imaging
Optical channel transport unit frames transmission having interleaved parity
Pickup device and method for manufacturing the same
Double patterning method using tilt-angle deposition
OFDM control signaling in the presence of timing asynchronization in a peer-to-peer network
  Randomly Featured Patents
Hard disk drive connector
Receiver tube and retaining clamp assembly for a hearing instrument receiver
Semiconductor memory and its production process
Method of animating a synthesized model of a human face driven by an acoustic signal
Apparatus for feeding cartridges from a drum magazine to a firing weapon
Earphone assembly
Implant for the delivery of electrical current to promote bone growth between adjacent bone masses
Crossed roller bearing
Game racket having innovative stringed surface
Amplification relay device of electromagnetic wave and a radio electric power conversion apparatus using the device