Resources Contact Us Home
Heat treatment device of the light irradiation type

Image Number 2 for United States Patent #6414279.

A heat treatment device of the light irradiation type with a long service life, in which effective, adequate cooling of the lamps (10) prevents devitrification of the lamp emission portion, even if the power supplied to the lamps is increased to accelerate the temperature increase of the wafer, is achieved by the provision of air injection lines (14) in a mirror (11), in which the lamps are mounted, for blowing in air into the vicinity of the lamps (10), and at least one air exhaust line (23) for evacuation of air from the vicinity of the lamps (10).

  Recently Added Patents
System and method for logical separation of a server by using client virtualization
Reaction medium for detecting and/or identifying bacteria of the Legionella genus
Hydrogenolysis of ethyl acetate in alcohol separation processes
Rose plant named `Esm R068`
Methods and systems for managing electronic messages
Traffic flow analysis mitigation using a cover signal
  Randomly Featured Patents
Translation support apparatus and computer-readable storage medium
Programmable cooking or baking apparatus and method
Process for decomposing cyclohexylhydroperoxide
Controlled contact pressure for scroll compressor seal
Photographic polyethylene coated paper support
Phase locked loop device and control method thereof
Oil feeding device for scroll fluid apparatus
Multilayer capacitor
Photo-or heat-curable resin composition and multilayer printed wiring board
Stacking mechanism and recording apparatus with locking mechanism for paper output tray