Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Heat treatment device of the light irradiation type










Image Number 2 for United States Patent #6414279.

A heat treatment device of the light irradiation type with a long service life, in which effective, adequate cooling of the lamps (10) prevents devitrification of the lamp emission portion, even if the power supplied to the lamps is increased to accelerate the temperature increase of the wafer, is achieved by the provision of air injection lines (14) in a mirror (11), in which the lamps are mounted, for blowing in air into the vicinity of the lamps (10), and at least one air exhaust line (23) for evacuation of air from the vicinity of the lamps (10).








 
 
  Recently Added Patents
Semiconductor integrated circuit, IC card mounted with the semiconductor integrated circuit, and operation method for the same
Azo compound and salt thereof, and dye-containing polarizing film comprising the compound or salt
Nut
Secured broadband device
Authentication and authorization of user and access to network resources using openid
Air-floating carrier type wind power collection device
Localization of peer to peer traffic
  Randomly Featured Patents
Antimicrobial polishing compound
Methods and systems for delivering lost circulation material into drilling pits
Composite backing structure for spray metal tooling
Communication system with physical interface and communication controller, and method
Magnetic brush developing method
Percutaneous twisting lock catheter
Golf shaft for controlling passive vibrations
Take-away mechanism for mail or other flat article handling system
Actuator structure for a magnetic head suspension assembly in a disk drive
Remote monitor interface