Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Low stiffness suspension for a stage










Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.








 
 
  Recently Added Patents
Method for identifying bacteria in a sample
Pre and post-paid real time billing convergence system
Partial response decision feedback equalizer with distributed control
Charged particle cancer therapy beam path control method and apparatus
Power supply apparatus for light emitting diode
Creating and manufacturing documents that initially exceed equipment finishing capacity
Lithographic apparatus and device manufacturing method
  Randomly Featured Patents
Optical recording and reproducing apparatus
Selective light-transmitting laminated structure
Recording apparatus with auxilliary recording and method thereof
High resolution, fully differential CMOS comparator
Driver circuit with temperature correction circuit
Image processing apparatus operable in plural operation modes
Temperature-activated polysilicic acids in paper production
Recording tape cartridge
Differential assembly
Bactericidic and fungicidic chloromethylisopropyphenols