Resources Contact Us Home
Low stiffness suspension for a stage

Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.

  Recently Added Patents
Pixel interleaving configurations for use in high definition electronic sign displays
Titanium compounds and complexes as additives in lubricants
Method and system for simulating wireless networks
Establishing a social network
Anti-FGFR3 antibodies and methods using same
Reactor core of liquid metal cooled reactor
Bad column management with bit information in non-volatile memory systems
  Randomly Featured Patents
Disposable lancet cap
Device and system for indicating rapid deceleration in vehicles
Hierarchical rate control of receivers in a communication system transmitting layered video multicast data with retransmission (LVMR)
Hernia belt
Safety interlock braking system for height adjustable table
Process for preparing 2-methyl-2-sec.butyl-1,3-propanediol
Magnetic levitation vibration systems and methods for treating or preventing musculoskeletal indications using the same
Dilution apparatus and method of diluting a liquid sample
Methods for forming and integrated circuit structures containing enhanced-surface-area conductive layers
Seal structures for wet/dry automatic injectors