Resources Contact Us Home
Low stiffness suspension for a stage

Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.

  Recently Added Patents
Method of optimizing air mover performance characteristics to minimize temperature variations in a computing system enclosure
Adaptive switch mode LED system
Subband SNR correction in a frequency selective scheduler
Cooking tray
Methods and devices for detecting and measuring environmental conditions in high performance device packages
Scalable packet processing systems and methods
Digital signal processing apparatus, liquid crystal display apparatus, digital signal processing method and computer program
  Randomly Featured Patents
Vitamin D analogues
Semiconductor structure having an enlarged finger shaped region for reducing electric field density and method of manufacturing the same
Gas bag module
Apparatus for the production of wire springs
Device and method for high-throughput quantification of MRNA from whole blood
Information processing apparatus and exception control circuit
Tape cassette hub retainers
Drill mast articulation assembly
Control system and process for automatically controlling water level in a washing machine
Disposable perineum cleaning device