Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Low stiffness suspension for a stage










Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.








 
 
  Recently Added Patents
Emergent information database management system
Nonvolatile semiconductor memory device and method for manufacturing the same
Process for shaping polymeric articles
Method for producing semiconductor substrate, semiconductor substrate, method for manufacturing electronic device, and reaction apparatus
Resolution setting apparatus, resolution setting method, and recording medium recording a resolution setting program when a television is used as a monitor of a computer
Irreversible thermochromic ink compositions
Image processing device, image processing method, and program
  Randomly Featured Patents
Combined speaker, amplifier box and microphone
Health supplements containing phyto-oestrogens, analogues or metabolites thereof
Blood purification device
Apparatus, system, and method for protecting and treating a traumatic wound
Semiconductor device and a method for fabricating the same
Methods for generating cytotoxic T cells in vitro
Golf club putter
Non linear network converting bipolar sawtooth signal into sinewave signal
Wide-band and continuous line adhesive applicator and method for cigarette filter attachment and the like
Diode