Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Low stiffness suspension for a stage










Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.








 
 
  Recently Added Patents
Solid-state imaging device and imaging apparatus
Information processing apparatus, including updating of program and program information, and method of updating program of the information processing apparatus
Hydrolases, nucleic acids encoding them and methods for making and using them
Method for mapping resource units
Wavelength and power scalable waveguiding-based infrared laser system
System and method for discontinuous reception control start time
Tray for microwave cooking and folding of a food product
  Randomly Featured Patents
Method of attachment of a semiconductor slotted lead to a substrate
Rod lens array
Progressive power lens
Low injection charge pump
Deflection fitting for a safety belt
Optical module and manufacturing method of the same, optical-communication apparatus, and electronic apparatus
GIS-based rapid population assessment tool
Electronic display having segments wherein each segment is capable of selectively illuminating two colors
Portable telephone with reduced specific absorption rate and improved efficiency
Coat hook