Resources Contact Us Home
Low stiffness suspension for a stage

Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.

  Recently Added Patents
System and method for monitoring network activity
Controller for flexible and extensible flow processing in software-defined networks
Co-map communication operator
Cable sheath
Information-provision control method, information reproduction system, information-provision apparatus, information reproduction apparatus and information-presentation control program
Fluid handling structure, a lithographic apparatus and a device manufacturing method
Adding value to a rendered document
  Randomly Featured Patents
Automatic tool changing apparatus
Electronic operations counter for a voltage regulator controller
Electrophotographic photoreceptor, process for the preparation thereof and image forming apparatus comprising the same
Electroluminescent panel and a manufacturing method therefor
Combining measurements from different sensors
Packet loss prevention during handoff using packet copy-and-forward
Processing apparatus and processing method
Bony anchor extender
LED package assembly with datum reference feature
Methods and systems to identify operational reaction pathways