Resources Contact Us Home
Low stiffness suspension for a stage

Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.

  Recently Added Patents
Flat panel display
Pre-primed roofing membrane
Apparatus and method to reduce noise in magnetic resonance imaging systems
Data distribution apparatus, data distribution method, and distribution control program
System of providing an internet web site that assists medical professionals draft a letter of medical necessity or other documentation for transmission to a third party payer on behalf of a pa
System for determining movement properties of a guided vehicle
Sampling switch circuit that uses correlated level shifting
  Randomly Featured Patents
Magneto-optical recording medium and writing and readout method therefor
Substantially constant boiling compositions of difluoromethane and trifluoroethane or perfluoroethane
Derivatives of tris(2-hydroxyphenyl)methane, their preparation and use
Adjustable photography light that maintains constant color temperature
Part mounting mechanism
Apparatus for generating an electrical energy
Computer for calculating the similarity between patterns
Window mounted electric candle or similar article
Iontophoretic drug delivery device having improved controller
Presentation navigation over telephone infrastructure