Resources Contact Us Home
Low stiffness suspension for a stage

Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.

  Recently Added Patents
Image processing apparatus, image printing apparatus and printing data generation method
Functional component compensation reconfiguration system and method
Method, preprocessor, speech recognition system, and program product for extracting target speech by removing noise
Video surveillance system employing video primitives
Lightning-protective explosion-preventive fastener
Methods of diagnosing a plasmodium infection
System and method for enhanced transaction payment
  Randomly Featured Patents
Fuel cell stack and a method of supplying reactant gases to the fuel cell stack
Thin film magnetic head for high density recording, a method of manufacturing the same, and a magnetic recording apparatus comprising the same
Automobile antenna
Computer keyboard with enhanced cooling and touch pad
System for supervising photomechanical process
Door weather strip for motor vehicle
Information processing device and method, program, and recording medium
Filler cap structure for a fuel tank
Lithotripter with two localization devices in an isocentric system
Medical diagnostic ultrasound system and method for power control