Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Low stiffness suspension for a stage










Image Number 12 for United States Patent #6408767.

A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). A bearing fluid (48) is directed from the fluid pad (22) to create a fluid bearing (52) between the fluid pad (22) and the stage base (12). The fluid bearing (52) allows for large displacement, frictionless motion along an X axis, along a Y axis and rotation about a Z axis. The adaptable section (24) secures the fluid pad (22) to the stage (14). The adaptable section (24) allows for relative movement between the fluid pad (22) and the stage (14). More specifically, the adaptable section (24) allows for small displacement, low stiffness motion along the Z axis and rotation about the X axis and the Y axis. In summary, the suspension system (18) permits six degrees of freedom motion and provides some vibration isolation along the Z axis.








 
 
  Recently Added Patents
Method for operation of multi-layer-multi-turn high efficiency inductors
Determination of statistical upper bound for estimate of noise power spectral density
System and method for monitoring network activity
Maize variety inbred PH1CD7
Sensor apparatus and information processing apparatus
Pyridylphenyl compounds for inflammation and immune-related uses
Treatment of celiac disease with IgA
  Randomly Featured Patents
Boosted perceptron
Method of making a perforated strip abrasive tool
Air-core stepping motor and shaft support structure
Method and apparatus for reducing redundant data in a layout data structure
Table-based DFM for accurate post-layout analysis
Inflatable catheter means and method
Use of flat wire as a reinforcement in the belt package of a pneumatic tire
Animal coat
Primer solution compositions and method of forming adhesive layer on tooth surface
Method and composition for treating prostate cancer