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System for reclaiming process water

Image Number 2 for United States Patent #6394174.

The present invention generally relates to a system and a method for reclaiming process water in a manufacturing plant and more particularly, relates to a system and a method for reclaiming process water from a cooling tower exhaust gas which contains at least 80% relative humidity by utilizing a heat exchanger equipped with cooling elements that are cooled by a flow of exhaust gas formed by a general exhaust and a scrubber exhaust from a semiconductor fabrication facility.

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