Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for fabricating an EEPROM device having a pocket substrate region










Image Number 4 for United States Patent #6376308.

A process for fabricating an EEPROM device having pocket substrate regions includes forming a pattern composite layer overlying a principal surface of a semiconductor substrate. The pattern composite layer includes a dielectric layer and a resist layer overlying the dielectric layer. Processing is carried out to reduce the lateral dimension of the resist layer relative to the dielectric layer thereby exposing an upper surface of the dielectric layer. A doping process is carried out in which dopants penetrate the exposed upper surface of the dielectric layer and enter the semiconductor substrate immediately below the exposed upper surface of the dielectric layer. Upon conforming the pocket regions, an oxidation process is carried out to form bit-line oxide regions in the semiconductor substrate.








 
 
  Recently Added Patents
Network traffic demotion
Noise spectrum tracking in noisy acoustical signals
Electrophotographic photoreceptor and image forming apparatus including the same
Re-establishing push notification channels via user identifiers
Isolated Australian coral reef fluorescent proteins and cell-based kinase or phosphatase platforms for cancer drug development
Piezoelectric quasi-resonance linear motors based on acoustic standing waves with combined resonator
Electrical terminal
  Randomly Featured Patents
Transcutaneous analyte sensor
Control of addition of conditioning agents to flue gas
Work table
Electromagnetic solenoid relay
Method and apparatus for reducing nitrogen dioxide emissions in a dry sodium scrubbing process using humidification
Football game using a triangular game piece with numerical values
Football game
Power transmission
Polyhydroxy-diamines as multi-functional additives for paints, coatings and epoxies
Pedestal base