Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for fabricating an EEPROM device having a pocket substrate region










Image Number 4 for United States Patent #6376308.

A process for fabricating an EEPROM device having pocket substrate regions includes forming a pattern composite layer overlying a principal surface of a semiconductor substrate. The pattern composite layer includes a dielectric layer and a resist layer overlying the dielectric layer. Processing is carried out to reduce the lateral dimension of the resist layer relative to the dielectric layer thereby exposing an upper surface of the dielectric layer. A doping process is carried out in which dopants penetrate the exposed upper surface of the dielectric layer and enter the semiconductor substrate immediately below the exposed upper surface of the dielectric layer. Upon conforming the pocket regions, an oxidation process is carried out to form bit-line oxide regions in the semiconductor substrate.








 
 
  Recently Added Patents
Drive coil, measurement probe comprising the drive coil and methods utilizing the measurement probe
Commissioning incoming packet switched connections
Control device of hybrid vehicle
Dimmer system and damper circuit thereof
AC/DC converter
Performance monitoring of advanced process control systems
Error scanning in flash memory
  Randomly Featured Patents
Pullover and shorts set
Curve smoothing without shrinking
Low power Bandgap reference circuit with increased accuracy and reduced area consumption
Reversible computer apparatus and methods of constructing and utilizing same
Tamping device and method of tamping a railroad track's ballast
Apparatus for converting an analogue input signal of narrow bandwidth to digital form
Dicyanobenzanthrone compounds
Disc layout and optimization process
Multi-site remote-copy system
Method of restricting telephone calls in a private branch exchange system