Resources Contact Us Home
Apparatus for and method of transporting substrates to be processed

Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

  Recently Added Patents
Semiconductor device and manufacturing method thereof
Multi-dimensional credibility scoring
Integrated circuit packaging system with heat slug and method of manufacture thereof
Artifact removal in nuclear images
Isolation rings for blocking the interface between package components and the respective molding compound
Meat-containing, strip shaped food product and method of making same
Front portion of a vehicle, toy, and/or replicas thereof
  Randomly Featured Patents
Roof top refrigeration equipment housing
Hole-drilling self-tapping screw
Illumination system and method for spatial modulators
System and method for topology constrained routing policy provisioning
Hydrostatic continuously variable transmission
Securing device for pot and pan lids
Catalyst useful for polymerizing olefins
Liquid crystal display device
Controlled dosage drug delivery