Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus for and method of transporting substrates to be processed










Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.








 
 
  Recently Added Patents
Compositions and methods for producing isoprene
Ion beam system and method of operating ion beam system
Erasing a non-volatile memory (NVM) system having error correction code (ECC)
Radiation detector array
Notification systems and methods that consider traffic flow predicament data
Phase lock loop with injection pulse control
Lubricating oil compositions
  Randomly Featured Patents
Vibrating device and image equipment having the same
Comparator amplifier
Dynamic random access memory device having a self refresh mode
Auxiliary heating device for standard hot water type home heating systems
Technetium 99m-N2S2-congo red complexes utilizing diamide dithiolate ligand systems for radioimaging
Substrate patterning for multi-gate transistors
Information holding device
Semiconductor device and method of manufacturing the same
Phenolic compound, preparation thereof and recording material employing same
Apparatus for dry placer mining and method of operating same