Resources Contact Us Home
Apparatus for and method of transporting substrates to be processed

Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

  Recently Added Patents
Redundant parallel operation of motor vehicle electrical system generators
Precoding codebooks for MIMO communication systems
Vibration disturbance estimation and control
Method and system for updating device management application meter read logic
Codeword-enhanced peer-to-peer authentication
Pausing multimedia data streams
  Randomly Featured Patents
Method for joining material
Prophylactic or therapeutic drug for renal diseases
Process for making ceramic matrix composite parts with cooling channels
Incipient clutch control system
Assembly techniques for solar cell arrays and solar cells formed therefrom
Method and arrangement for locally switching gray dot types to reproduce an image with gray level printing
Video image processing with utility processing stage
Method of manufacturing a composite microwave circuit module
Process for producing 4-methylpentene-1 copolymer and resin composition containing the same