Resources Contact Us Home
Apparatus for and method of transporting substrates to be processed

Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

  Recently Added Patents
System and method of implementing a concurrency profiler
Specialized store queue and buffer design for silent store implementation
Method to screen high affinity antibody
Compression and decoding of single sensor color image data
Towel dispenser key
Methods of improving long range order in self-assembly of block copolymer films with ionic liquids
Local biomechanical and/or antimicrobial ligation device
  Randomly Featured Patents
Apparatus for detecting a residual quantity of toner
Partial combining method and apparatus for multimedia broadcast/multicast service
Semiconductor laser device
Fluid dispenser including an improved pressure regulator
Dual layered pet toy
Head drum assembly for a VCR with a shaft including a vertical groove and a slanted groove
Furniture base
Detecting ice particles
Device for the weld joining of sheet metal strips