Resources Contact Us Home
Apparatus for and method of transporting substrates to be processed

Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

  Recently Added Patents
Vacuum switch and electrode assembly therefor
Method and device for monitoring and analyzing signals
Herbal composition for the treatment of wound healing, a regenerative medicine
Reovirus for the treatment of cellular proliferative disorders
Determining ill conditioning in square linear system of equations
Face recognition through face building from two or more partial face images from the same face
Control device with adjusting pulse width modulation function and the backlight module thereof
  Randomly Featured Patents
Rotary valve with spring biased valve member
Programmable fan control method and apparatus for use in a food oven
Closed circuit video magnification system
Operation stand for measuring sheet size for sheet-fed press
Gasification of ash containing carbonaceous solids
Capping mechanism for a print engine
Potentilla plant named `Lundy`
Method for controlling the switching speed of bipolar power devices
Connector management structure with channel
Support device for supporting frames and other objects from a structure