Resources Contact Us Home
Apparatus for and method of transporting substrates to be processed

Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

  Recently Added Patents
Defected ground plane inductor
Antenna module and wireless communication apparatus
Apparatus with a local timing circuit that generates a multi-phase timing signal for a digital signal processing circuit
Manufacturing method power semiconductor device
Sending notification of event
Highly stable electrolytic water with reduced NMR half line width
Floor standing rack
  Randomly Featured Patents
Fluid-powered rotary motor
Sheet-feed tractor providing pin or friction feed
BCD adder circuit
Apparatus and method for supporting NAT traversal in voice over internet protocol system
Fish hook
Decorative panel
Confocal imaging system for visible and ultraviolet light
Method of forming an injector valve nut seal
KEX2 endoprotease without a C-terminal hydrophobic region
Electric flash apparatus