Resources Contact Us Home
Apparatus for and method of transporting substrates to be processed

Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.

  Recently Added Patents
Image forming apparatus and information processing apparatus
Channel marking for chip mark overflow and calibration errors
Secure data exchange for processing requests
Transporting business intelligence objects between business intelligence systems
Method of controlling an indentation depth of an electrode into a metal substrate during welding
End-of-session authentication
Method and system for the assignment of security group information using a proxy
  Randomly Featured Patents
Protective coarsening anneal for zirconium alloys
Apparatus and method for destructive testing of coupons formed from metal
Solid-state variable-conductance device
Tortuous path sand control screen and method for use of same
Protective cover for electrical assembly unit
Surveillance camera system
Photometer for a camera
Track car drive system, and track car using the system
Conveyor control system for a self-loading scraper
Method for hot gas cooling and gaseous contaminant removal