Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Apparatus for and method of transporting substrates to be processed










Image Number 12 for United States Patent #6368040.

A substrate transporting apparatus includes a wafer transfer arm 10 for carrying a plurality of semiconductor wafers W being processed horizontally, a pitch changer 20 for carrying the wafers W at predetermined intervals vertically and a posture changing device 30 positioned between the wafer transfer arm 10 and the pitch changer 20, for changing the posture of the wafers W to the horizontal and vertical arrangements. The pitch changer 20 includes a first holding part 21A and a second holding part 21B which are adapted so as to elevate relatively to each other. The wafers W are held by either one of the holding parts 21A, 21B at the predetermined intervals. The posture changing device 30 has a pair of holders 31 between which the semiconductor wafers W is interposed. The holders 31 are respectively provided, on their sides opposing each other, with a plurality of holding grooves 32A, 32B for retaining the wafers W independently. With the arrangement, the whole apparatus can be small-sized to improve throughput and yield of products.








 
 
  Recently Added Patents
Storage apparatus and storage apparatus management method performing data I/O processing using a plurality of microprocessors
Method of preparing enteric hard capsule and enteric hard capsule prepared thereby
Image forming apparatus, image forming method, and computer readable medium for identifying target-recording element using detection pattern
Magnetic memory element, driving method for same, and nonvolatile storage device
Multiple secure elements in mobile electronic device with near field communication capability
System and method for reducing antivirus false positives
Driver circuit for driving semiconductor switches
  Randomly Featured Patents
Polyvinyl alcohol composition, process for its preparation and its use
Output circuit for a CCD with a D.C. restoration circuit integrated together with the CCD in a monolithic semiconductor chip
Process for producing zirconium-based alloy
Multi-volume, write-behind data storage in a distributed processing system
Vacuum cleaner
Pole insulator cap
Porthole-suspended storage bag
Process for partial liquefaction of a fluid containing hydrocarbons, such as natural gas
Fill valve
Stand assembly for an optical device