Resources Contact Us Home
Thin film transistor, method of producing the same, liquid crystal display, and thin film forming apparatus

Image Number 10 for United States Patent #6355943.

The invention intends to provide a TFT having a gate insulating film which has a high dielectric withstand voltage and can ensure a desired carrier mobility in an adjacent semiconductor active film. A gate electrode and a semiconductor active film are formed on a transparent substrate with a gate insulating film, which is formed of two layered insulating films, held between them. The gate insulating film is made up of a first gate insulating film which improves a withstand voltage between the gate electrode and the semiconductor active film, and a second gate insulating film which improves an interface characteristic between the gate insulating film and the semiconductor active film . The first and second gate insulating films are each formed of a SiN.sub.x film. The optical band gap of the first gate insulating film has a value in the range of 3.0 to 4.5 eV, and the optical band gap of the second gate insulating film has a value in the range of 5.0 to 5.3 eV.

  Recently Added Patents
Circuit arrangement having a load transistor and a voltage limiting circuit and method for driving a load transistor
Panel for decoration
Encryption using alternate authentication key
Reduced sorbent utilization for circulating dry scrubbers
Fabric care compositions comprising front-end stability agents
Restarting event and alert analysis after a shutdown in a distributed processing system
Process for producing polyphenylene ether composition
  Randomly Featured Patents
Motor starting control method, motor driving system and motor system
Illuminated sign with channels for moveable character plates
Methods of inhibiting complement activation
Wireless local area network device supporting enhanced call functions
Fume exhaust system for photo print processors
Electron microscope, measuring method using the same, electron microscope system, and method for controlling the system
Ultrasonic treatment of pathological tissue
Device for controlling and/or measuring operational parameters of an axial piston machine
Novel fluorescent dye
Filtering unit and filtering equipment incorporating said unit