Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
High pressure N2 RTA process for TiS2 formation










Image Number 7 for United States Patent #6348413.

In one aspect of the present invention, a method of forming a layer of silicide on a surface of a silicon-containing structure surface that is separated from a first structure by a second structure is provided. The method includes the steps of forming a layer of silicide-forming material on the surface of the silicon-containing structure, and the first and second structures. The layer of silicide-forming material is annealed in an ambient containing a nitrogen bearing species at a pressure greater than about one atmosphere to form the layer of silicide on the surface of the silicon-containing structure. The nitrogen bearing species reacts with the silicide-forming material to retard the formation of silicide on the third structure. The method reduces the potential for silicide bridging between, for example, the gate and source/drain regions of a transistor during silicide contact formation.








 
 
  Recently Added Patents
Nickel-cobalt-manganese multi-element lithium ion battery cathode material with dopants and its methods of preparation
Electronic device and control method therein
Parallel power inverter motor drive system
Method and system for routing telephony communications together with modified calling party identifier information
Data scrambling in memory devices
Stain-blocking aqueous coating composition
Provision of downlink packet access services to user equipment in spread spectrum communication network
  Randomly Featured Patents
Propargyl phenyl ether A2A receptor agonists
Current switched Josephson junction memory and logic circuits
Compact floribunda rose variety `POULpeacy`
Benzimidazole derivatives useful as gastric acid secretion inhibitors
Bessel beam radar system using sequential spatial modulation
Apparatus for detecting torque, axial position and axial alignment of a rotating shaft
Silver halide photosensitive material and method for forming image
Compositions and methods for treating cancer using immunoconjugates and chemotherapeutic agents
Substrate holder
Image forming apparatus with neighboring pixel processing