Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
High pressure N2 RTA process for TiS2 formation










Image Number 7 for United States Patent #6348413.

In one aspect of the present invention, a method of forming a layer of silicide on a surface of a silicon-containing structure surface that is separated from a first structure by a second structure is provided. The method includes the steps of forming a layer of silicide-forming material on the surface of the silicon-containing structure, and the first and second structures. The layer of silicide-forming material is annealed in an ambient containing a nitrogen bearing species at a pressure greater than about one atmosphere to form the layer of silicide on the surface of the silicon-containing structure. The nitrogen bearing species reacts with the silicide-forming material to retard the formation of silicide on the third structure. The method reduces the potential for silicide bridging between, for example, the gate and source/drain regions of a transistor during silicide contact formation.








 
 
  Recently Added Patents
Method of forming wafer level mold using glass fiber and wafer structure formed by the same
Method and system for establishing security connection between switch equipments
Magnetic reading and writing device
Peer to peer (P2P) missing fields and field valuation feedback
Method and composition for attracting arthropods by volatizing an acid
Metal foil laminate, substrate for mounting LED, and light source device
Apparatus for preventing overcharge of a battery
  Randomly Featured Patents
Cover and walking attachment for in-line skate wheels
Photographic processing composition and processing method using the same
Wrenching method and apparatus, wrenching attachment, and medium storing wrenching torque control program
Evaporative fuel treating device and method
Apparatus useful for rapidly determining the molecular weight of a flowing gaseous material
Vulcanizable fluoroelastomer compositions providing vulcanizates having high adhesion to metals
Admission control where priority indicator is used to discriminate between messages
Piezoelectric actuator, method for producing piezoelectric actuator, liquid transporting apparatus, and method for producing liquid transporting apparatus
Asymmetric plating
Method of restoring posterior teeth with interproximal decay, and kit of armamentarium therefor