Resources Contact Us Home
Interconnection forming method utilizing an inorganic antireflection layer

Image Number 2 for United States Patent #6348405.

A TiN film and an ARL-SiON film (plasma SiO.sub.2 film+plasma SiON film) are deposited on a metal interconnection layer. The film thickness and the film quality of the ARL-SiON film is optmized to minimize the reflectance factor of the metal interconnection layer, and the composition of the ARL-SiON film is so adjusted that the ARL-SiON film can be easily dissolved by a hydrofluoric acid in a later process. The multi-layer antireflection layer composed of the TiN film and the ARL-SiON film, and the underlying metal interconnection layer are continuously dry-etched in the same processing chamber. At this time, the basis of the etching gas is composed of a combination of chlorine based gases (Cl containing gas such as Cl.sub.2, BCl.sub.3, HCl) which is the same as that used for etching the metal film. Furthermore, when the etching gas composed of a combination of Cl.sub.2 and BCl.sub.3 is used, the mixing ratio of the etching gas is changed. Thus, the inorganic antireflection layer is hard of changing its film nature even if it is subjected to a wet removing treatment and a plasma ashing for the resist when the rework of the lithography becomes necessary.

  Recently Added Patents
Process for making diethyl ether from acetic acid
Toner cartridge
Method for sending status information in mobile telecommunications system and receiver of mobile telecommunications
Image processing apparatus and image processing method
Plants and seeds of hybrid corn variety CH979678
Minimizing mismatch during compensation
  Randomly Featured Patents
Fluidizing agent
Electromagnetic pressure regulating valve
Protease variants
Method and apparatus for compressing and decompressing data
Two stage pressure swing adsorption process which utilizes an oxygen selective adsorbent to produce high purity oxygen from a feed air stream
Pinball simulator game system
Image communicating apparatus providing proper display of received images with facilitated user control
Passive and active up-drill features on fixed cutter earth-boring tools and related systems and methods
Decorative or protective molding for a vehicle body
Body massager