Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Split gate flash memory device with source line










Image Number 11 for United States Patent #6326662.

A method of forming split gate electrode MOSFET devices comprises the following steps. Form a tunnel oxide layer over a semiconductor substrate. Form a floating gate electrode layer over the tunnel oxide layer. Form a masking cap over the floating gate electrode layer. Pattern gate electrode stacks formed by the tunnel oxide layer and the floating gate electrode layer in the pattern of the masking cap. Pattern source line slots in the center of the gate electrode stacks down to the substrate. Form source regions at the base of the source lines slots. Form intermetal dielectric and control gate layers over the substrate covering the stacks. Pattern the intermetal dielectric and control gate layers into adjacent mirror image split gate electrode pairs. Form self-aligned drain regions.








 
 
  Recently Added Patents
Drug delivery system
ZnO green luminescent material and its preparation
2,5-disubstituted piperidine orexin receptor antagonists
Method and apparatus for managing network traffic
High-performance AHCI interface
Baseball player stationery tab
System and method for detecting an earth ground fault of an external power supply connected to a vehicle
  Randomly Featured Patents
Track-type electrical distribution system
Electric shift apparatus with removable control module
Fibre channel input/output data routing system and method
Metal structural component having a heat insulating titanium fire inhibiting protective coating
Method for manufacturing semiconductor elements from amorphous silicon
Pallet racking system
Acoustic signaling device for culinary-use vessels, in particular for kettles
Method of applying high adhesion ultraviolet curable coatings and coated articles
Method for recycling used-up plastic products and washing process of crushed plastic and apparatus therefor
Method for mine support and composition