Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Split gate flash memory device with source line










Image Number 11 for United States Patent #6326662.

A method of forming split gate electrode MOSFET devices comprises the following steps. Form a tunnel oxide layer over a semiconductor substrate. Form a floating gate electrode layer over the tunnel oxide layer. Form a masking cap over the floating gate electrode layer. Pattern gate electrode stacks formed by the tunnel oxide layer and the floating gate electrode layer in the pattern of the masking cap. Pattern source line slots in the center of the gate electrode stacks down to the substrate. Form source regions at the base of the source lines slots. Form intermetal dielectric and control gate layers over the substrate covering the stacks. Pattern the intermetal dielectric and control gate layers into adjacent mirror image split gate electrode pairs. Form self-aligned drain regions.








 
 
  Recently Added Patents
Apparatus and method for protecting receive circuits in TDD wireless communication system
Mobile device and method for controlling the same
Lockup clutch control apparatus and lockup clutch control method
Method of performing attach procedures
Implementing user-selectable concurrent access protection mechanism in a multi-tasking modeling environment
Automated trading system
Method, combiner and system for transmitting signals
  Randomly Featured Patents
Method for providing incentive to play gaming devices connected by a network to a host computer
Solar panel
Vessel provided with a propeller tunnel
Apparatus and process for removal of carbon monoxide
Modified trace-back using soft output viterbi algorithm (SOVA)
Method for authenticating an electronic signature
System and method for providing a joint for an animatable character for display via a computer system
Methods and systems for optical and non-optical measurements of a substrate
Method and apparatus for proportioning of fuel usage by a fluid fueled apparatus
Bottle carrier