Resources Contact Us Home
Split gate flash memory device with source line

Image Number 11 for United States Patent #6326662.

A method of forming split gate electrode MOSFET devices comprises the following steps. Form a tunnel oxide layer over a semiconductor substrate. Form a floating gate electrode layer over the tunnel oxide layer. Form a masking cap over the floating gate electrode layer. Pattern gate electrode stacks formed by the tunnel oxide layer and the floating gate electrode layer in the pattern of the masking cap. Pattern source line slots in the center of the gate electrode stacks down to the substrate. Form source regions at the base of the source lines slots. Form intermetal dielectric and control gate layers over the substrate covering the stacks. Pattern the intermetal dielectric and control gate layers into adjacent mirror image split gate electrode pairs. Form self-aligned drain regions.

  Recently Added Patents
Tuning peg for a stringed instrument
Active pulse blood constituent monitoring
Solar cell with hyperpolarizable absorber
Methods of making a diagnostic device by interweaving hydrophobic and hydrophilic fibers, and diagnostic device therefrom
Systems and methods for determining muscle force through dynamic gain optimization of a muscle PID controller for designing a replacement prosthetic joint
Apparatus and method for weighing an item of mail during transport through a sorting installation and having an anti-vibration device
Authentication platform and related method of operation
  Randomly Featured Patents
Turbofan engine comprising an spicyclic transmission having bearing journals
Tri-state type driver circuit
End clip for an exercise band
Crosslinkable syrup copolymers with aminoalkyl (meth)acryloyl solvent monomers
Disposable massage apparatus
Marketing, design, and construction techniques for buildings
System and method for compensating packet delay variations
Position setting device for a steering column of a vehicle
Secondary locking of a plug-in connection on two planes
Explosion proof electrical conduit sealing fitting