Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma treatment system










Image Number 15 for United States Patent #6322662.

In a plasma treatment system, the increase of the electric field of a treatment space facing the central portion of a flat antenna member is relieved, and the ununiformity of the density of plasma in a plasma forming region is relieved.Microwave generated by a microwave generator 50 are supplied from a waveguide 52 to a flat antenna member 44. The flat antenna member 44 has a plurality of slots 60. The space between adjacent two of the slots 60 is longer than the guide wavelength of microwaves in the waveguide 52, and the length of each of the slots 60 is shorter than half of the guide wavelength. The slots 60 are arranged in a region other than the central portion of the flat antenna member 44 so as not to be axisymmetric.








 
 
  Recently Added Patents
Electronic device that includes ranked control units that are connected together and control method thereof
Apparatus and methods for use in flash detection
Structural display having adjustable mounting widths for use in a retail environment
Installing and executing shared applications in shared folders
Self-assembly of chips on a substrate
Method and apparatus for master privacy policy mechanism in a communications network
System and method for informing a sender of a message of content adaptation and message failure issues
  Randomly Featured Patents
Method of modeling the socio-spatial dynamics of extreme urban heat events
Photocatalytic compositions and methods for use
Antibiotic 354 and process for producing same
Rear combination lamp
Method for enhancing mass transport in fuel deoxygenation systems
Methods and apparatus for determining when tachyarrythmia is pace-terminable
Earthing module
Bed-making device
Stand for a chromatography column
Automotive vehicle seat with a lengthwise adjustment device, a seat carrier and rear rockers