Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma treatment system










Image Number 15 for United States Patent #6322662.

In a plasma treatment system, the increase of the electric field of a treatment space facing the central portion of a flat antenna member is relieved, and the ununiformity of the density of plasma in a plasma forming region is relieved.Microwave generated by a microwave generator 50 are supplied from a waveguide 52 to a flat antenna member 44. The flat antenna member 44 has a plurality of slots 60. The space between adjacent two of the slots 60 is longer than the guide wavelength of microwaves in the waveguide 52, and the length of each of the slots 60 is shorter than half of the guide wavelength. The slots 60 are arranged in a region other than the central portion of the flat antenna member 44 so as not to be axisymmetric.








 
 
  Recently Added Patents
Expressive grouping for language integrated queries
Pharmaceutical powder compositions
Front end for RF transmitting-receiving systems with implicit directional control and time-multiplexing method in submicron technology
State control of remote hosts for management of distributed applications
Nonvolatile semiconductor memory device
Method of sheet alignment and method of post-processing comprising the same and method of image formation
Triple-action pest control formulation and method
  Randomly Featured Patents
Spark plug for internal combustion engine and method of manufacturing the same
Electrolyzed water production system
Method and apparatus for forming a ceramic catalyst support
Stretchable absorbent article
Hair trimmer
Ink jet printing apparatus and ink jet printing method
Switch arrangement for door closers
Transmitting unit
Memory devices using tri-state buffers to discharge data lines, and methods of operating same
Method and computer program product for calculating event occurrences