Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma treatment system










Image Number 15 for United States Patent #6322662.

In a plasma treatment system, the increase of the electric field of a treatment space facing the central portion of a flat antenna member is relieved, and the ununiformity of the density of plasma in a plasma forming region is relieved.Microwave generated by a microwave generator 50 are supplied from a waveguide 52 to a flat antenna member 44. The flat antenna member 44 has a plurality of slots 60. The space between adjacent two of the slots 60 is longer than the guide wavelength of microwaves in the waveguide 52, and the length of each of the slots 60 is shorter than half of the guide wavelength. The slots 60 are arranged in a region other than the central portion of the flat antenna member 44 so as not to be axisymmetric.








 
 
  Recently Added Patents
Microfluidic cartridge and method of using same
Apparatus and method for recording reboot reason of equipment
Multiplanar image displays and media formatted to provide 3D imagery without 3D glasses
Digital display devices and digital projectors with expanded color gamut
Hepodxilin analog enantiomers
Lubricant composition and antioxident composition
High porosity ceramic honeycomb article containing rare earth oxide and method of manufacturing same
  Randomly Featured Patents
Fixing device, image forming apparatus and method of controlling fixing device
Polypropylene-based resin composition and injection molded article comprising the same
Differential comparator and analog-to-digital converter comparator bank using the same
Solid flight conveying screw for furnace
Hydraulic well pump
Iridium-catalyzed carbonylation process for the production of acetic acid
Bimetal thermometer
Aluminum-lithium alloys and method
Dispensing container for soft-frozen comestibles or the like
Programmable amplifier