Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma treatment system










Image Number 15 for United States Patent #6322662.

In a plasma treatment system, the increase of the electric field of a treatment space facing the central portion of a flat antenna member is relieved, and the ununiformity of the density of plasma in a plasma forming region is relieved.Microwave generated by a microwave generator 50 are supplied from a waveguide 52 to a flat antenna member 44. The flat antenna member 44 has a plurality of slots 60. The space between adjacent two of the slots 60 is longer than the guide wavelength of microwaves in the waveguide 52, and the length of each of the slots 60 is shorter than half of the guide wavelength. The slots 60 are arranged in a region other than the central portion of the flat antenna member 44 so as not to be axisymmetric.








 
 
  Recently Added Patents
System and methods for facilitating and documenting user thinking and learning using enhanced interactive constructs
Lubricating oil with enhanced protection against wear and corrosion
Coordinated garbage collection for raid array of solid state disks
Method and apparatuses for solving weighted planar graphs
Light emitting diode having multi-cell structure and method of manufacturing the same
Display screen with graphical user interface
Methods and systems for automatically identifying a logical circuit failure in a data network
  Randomly Featured Patents
Method of joining belt ends
Software for the display of chromatographic separation data
Pop-up tie down device and method for using same
Low power consumption data processing system
Automatic feeder
Combined container and closure
Personal crime prevention bracelet
Print on demand inserter
Device and method for assisting inflation
Process for preparing simvastatin having controlled ranges of simvastatin dimer content