Resources Contact Us Home
Plasma treatment system

Image Number 15 for United States Patent #6322662.

In a plasma treatment system, the increase of the electric field of a treatment space facing the central portion of a flat antenna member is relieved, and the ununiformity of the density of plasma in a plasma forming region is relieved.Microwave generated by a microwave generator 50 are supplied from a waveguide 52 to a flat antenna member 44. The flat antenna member 44 has a plurality of slots 60. The space between adjacent two of the slots 60 is longer than the guide wavelength of microwaves in the waveguide 52, and the length of each of the slots 60 is shorter than half of the guide wavelength. The slots 60 are arranged in a region other than the central portion of the flat antenna member 44 so as not to be axisymmetric.

  Recently Added Patents
System and method for terminating communication sessions with roaming mobile devices
Proximity-based mobile message delivery
Process for the production of electric energy by the excitation and capture of electrons from ground or water sources
Strongly bound carbon nanotube arrays directly grown on substrates and methods for production thereof
Aircraft drive
Power or voltage oscillation damping in a power transmission system
Roll of continuous web of optical film laminate and production method therefor
  Randomly Featured Patents
Methods and apparatus for assembling cooking appliances
In-wall coin bank with novelty face
Paste providing method, soldering method and apparatus and system therefor
Composite molded product for use as a button for electric devices and method of manufacturing the same
Microprogrammed control data processing apparatus in which operand source and/or operand destination is determined independent of microprogram control
Gradient barrier layer for copper back-end-of-line technology
Process of preparing copolymer latex and use thereof
Combined receiver and latch
Isometric exerciser
Benzisothiazole-1,1-dioxide and naphtho-1,2-thiazine-1,1-dioxide compounds