Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Plasma treatment system










Image Number 15 for United States Patent #6322662.

In a plasma treatment system, the increase of the electric field of a treatment space facing the central portion of a flat antenna member is relieved, and the ununiformity of the density of plasma in a plasma forming region is relieved.Microwave generated by a microwave generator 50 are supplied from a waveguide 52 to a flat antenna member 44. The flat antenna member 44 has a plurality of slots 60. The space between adjacent two of the slots 60 is longer than the guide wavelength of microwaves in the waveguide 52, and the length of each of the slots 60 is shorter than half of the guide wavelength. The slots 60 are arranged in a region other than the central portion of the flat antenna member 44 so as not to be axisymmetric.








 
 
  Recently Added Patents
Method and system for modifying satellite radio program subscriptions in a mobile vehicle
Clip
Media processing method and device
Method and device for determining processed image data about a surround field of a vehicle
Semiconductor arrangement with a solder resist layer
Transaction cost recovery queue management
Press nut
  Randomly Featured Patents
Radiation-sensitive semiconductor device and method of manufacturing same
Method for cooling a turbo machine and turbo machine
Audio fishing lure system for attracting species specific fish
Fluid controller
Radar protected against rain clutter and method for protecting a radar against rain clutter
Moisture curable organopolysiloxanes
High strength medical electrical lead
Antiviral compounds
Garment accessory
Combination vacuum cleaner and water extractor power foot