Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods of forming integrated circuit capacitors by electroplating electrodes from seed layers










Image Number 10 for United States Patent #6294425.

Methods of forming integrated circuit capacitors include forming a first electrically conductive layer on a semiconductor substrate and forming a first electrically insulating layer on the first electrically conductive layer. The first electrically insulating layer and the first electrically conductive layer are then patterned to define an opening in the first electrically insulating layer and expose a sidewall of the first electrically conductive layer. A second electrically conductive layer is then electroplated into the opening, using the exposed sidewall of the first electrically conductive layer as an electroplating seed. The patterned first electrically insulating layer and at least a portion of the patterned first electrically conductive layer are then removed to define a first capacitor electrode as the electroplated second electrically conductive layer. A capacitor dielectric layer is then formed on the first capacitor electrode. A complete capacitor structure is then provided by forming a second capacitor electrode on the capacitor dielectric layer, opposite the first capacitor electrode.








 
 
  Recently Added Patents
Storage device having clock adjustment circuitry with firmware-based predictive correction
Pixel structure of a solid-state image sensor employing a charge sorting method
Biosensor kit
Methods and apparatus for imaging in conjunction with radiotherapy
Electrode and method for manufacturing the same
Image forming apparatus
Imaging lens having five lens elements, and electronic apparatus having the same
  Randomly Featured Patents
Method for the high level expression, purification and refolding of the outer membrane group B porin proteins from Neisseria meningitidis
Record carrier containing a signal having a sequence of successive information signal portions
Method for seamless port capability for an alternative service provider
Method and apparatus for data reproduction
Method for manufacturing ball bearings; a sintered metal outer race preform for use therein; and a ball bearing produced thereby
Speaker device
Indazolyl-substituted pyrroline compounds as kinase inhibitors
Camping stove
Pattern generation on a semiconductor surface
Cefdinir intermediate