Resources Contact Us Home
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization

Image Number 7 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.

  Recently Added Patents
Semiconductor device
Adaptive dimmer detection and control for LED lamp
Ink-jet recording apparatus and ink-jet recording method
Apparatus for and method of processing glass optical fiber, method of manufacturing and method of drawing optical fiber
Torque compensation method and system
Vehicle-based threat detection system
  Randomly Featured Patents
Core bit
Serum-free, low-protein media for rotavirus vaccine production
Plastic bag dispenser
Method for manufacturing microlens and method for manufacturing solid-state image sensor
Method of flow forming
Process for preparing short chain alkyl aromatic compounds
Substituted acetamide derivatives, process for their preparation and antiulcer drug containing same
Hay dryer
Hybrid-energized synchronous electric machine
Apparatus for recycling complete cycles of a stored periodic signal