Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization










Image Number 7 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.








 
 
  Recently Added Patents
Sequential control device for a striking mechanism
Vehicle headlight
Group of amino substituted benzoyl derivatives and their preparation and their use
Elegant solutions for fingerprint image enhancement
Color stable manganese-doped phosphors
Masking method and apparatus
Method for manufacturing photoelectric conversion device
  Randomly Featured Patents
Facsimile apparatus with error correction and improved switching means
Blood sampler device
Nano-linked heteronuclear metallocene catalyst compositions and their polymer products
Tertiary sulfonamide antioxidants
Load-tilt attachment employing a pinion gear arrangement
Display mount with selectively positionable uprights
Methods for inhibiting rust infections of plants
Paper product
Load balancing for cellular and wireless systems
Thermo-hydro-dynamic system