Resources Contact Us Home
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization

Image Number 5 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.

  Recently Added Patents
Organic light emitting diode light source device
Methods, systems, and products for providing ring backs
Mobile communication device and method for providing positioning information
Systems and methods for minimization or elimination of diffusion effects in a microfluidic system
Near-field transducers for focusing light
Externally gapped line arrester
Method of fabricating display device
  Randomly Featured Patents
Spliced fiber glass rovings and methods and systems for splicing fiber glass rovings
Information processing apparatus, host bus adaptor and control method
Turbine shroud segment
Motor vehicle body protection apparatus and method of making
Method for treating anxiety with muscarinic cholinergic receptor agonists
Multi-head suction assembly for use in surgical procedures
Input device with pattern and tactile feedback for computer input and control
Antiblooming structure for solid-state image sensor
Method for forming powder metal gears
Method and system for interfacing to a plurality of antennas