Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization










Image Number 5 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.








 
 
  Recently Added Patents
Knife grip
Inter-carrier communications for multimedia-message delivery
Range extension techniques for a wireless local area network
Method and device for extracting vapors in an injection molding machine
Configurable caged ball insert for a downhole tool
MiR 204, miR 211, their anti-miRs, and therapeutic uses of same
Vehicle and communication monitoring
  Randomly Featured Patents
Rotary operation type variable resistor
Estrogenic-active compounds and application thereof
Projector-type head lamp for vehicles
Ice granules containing endotoxins of Bacillus thuringiensis israelensis (BTI) or Bacillus sphaericus (BS)
Automated emphasizing of an object in a digital photograph
Low shear treatment for the removal of free hydrocarbons, including bitumen, from cuttings
Time synchronization in units at different locations
Curable fluorescent organopolysiloxane compositions
Catalytic synthesis of phenols
Soluble articles for measuring or transferring materials and methods and systems using the articles