Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization










Image Number 3 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.








 
 
  Recently Added Patents
Verification of a portable consumer device in an offline environment
Semiconductor device, integrated circuit and method of manufacturing an integrated circuit
Error correct coding device, error correct coding method, and error correct coding program
Process for the production of electric energy by the excitation and capture of electrons from ground or water sources
Multiple CQI feedback for cellular networks
Polyfunctional sulfur-containing epoxies and compositions thereof
Power converter with a variable reference voltage and inrush current limiting
  Randomly Featured Patents
Contact for electric connector and method of making the same
Detergent composition comprising a block copolymer
Dual-purpose tape dispenser
Resin calender roll
High electron mobility transistor including an embedded flourine region
Memory devices with page buffer having dual registers and method of using the same
Drinking straw with a heron shape
Apparatus for appoximating envelope data and for extracting envelope data from a signal
Dispersion interferometer using orthogonally polarized waves
Fray-resistant wick and method of manufacturing same