Resources Contact Us Home
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization

Image Number 3 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.

  Recently Added Patents
Cartridge for conducting a chemical reaction
Subband SNR correction in a frequency selective scheduler
Method for manufacturing a substrate for a display device
Light emitting device
Method for automatically estimating inertia in a mechanical system
System and method for logical separation of a server by using client virtualization
Method for accessing wireless network
  Randomly Featured Patents
Creating imbalanced thrust in a center line mounted multi-engine jet aircraft configuration and a method of using imbalanced thrust
Automated court document docketing filing system
Recording device
Semiconductor device and method of manufacturing the same
Particulate material transfer system
Self watering system
Nonvolatile semiconductor memory device having plural memory cells which store multi-value information
Process for the preparation of cinnamic acid esters
Method for constructing a casket
Reagents and methods for the screening of compounds useful in the treatment of neurological diseases