Resources Contact Us Home
Integrated method for etching of BLM titanium-tungsten alloys for CMOS devices with copper metallization

Image Number 3 for United States Patent #6293457.

Form a solder connector on a semiconductor device starting with a first step of forming at least one dielectric layer over a doped semiconductor substrate. Then form a hole through the dielectric layer down to the semiconductor substrate. Form a metal conductor in the hole. Form intermediate layers over the metal conductor and the dielectric layer. Then form a tapered opening down to the surface of the metal conductor. Form BLM layers including a titanium-tungsten (TiW) layer over the metal conductor and the dielectric layer with the remainder of the BLM layers being formed over the TiW layer. Form a mask over the top surface of the BLM layers with a patterning through hole located above the metal conductor exposing a portion of the surface of the BLM layers. Plate a C4 solder bump on the BLM layers in the patterning hole. Remove the mask. Wet etch away the BLM layers aside from the solder bump leaving a residual TiW layer over the dielectric layer. Perform a dry etching process to remove the residual TiW layer aside from the solder bump. Then, end the dry etching when the end point has been reached. Finally, heat the solder bump in a reflow process to form a C4 solder ball.

  Recently Added Patents
Signal apparatus for facilitating safe backup of vehicles
Techniques for data assignment from an external distributed file system to a database management system
System and method for managing content on a network interface
Printable and printed articles
Systems and methods for providing power and data to lighting devices
System and method for predicting remaining useful life of device components
  Randomly Featured Patents
Oxime derivatives and their use as pharmaceutically active agents
Ultra thin radiation management and distribution systems with hybrid optical waveguide
System and a method of correcting baseline wander
Integrated circuit with temperature detector
Apparatus for withdrawing permeate using an immersed vertical skein of hollow fibre membranes
Method and apparatus for in-cutting and out-cutting during coal mining
Fuel injection valve for internal combustion engines
Method and apparatus for providing audio advertisements in a computer network
Methods for controlling biofouling using amino methyl phosphonic acids
Electronic apparatus, program, and focus control method of electronic apparatus