Resources Contact Us Home
Structure and method for fabricating a field effect transistor with a self-aligned anti-punchthrough implant channel

Image Number 3 for United States Patent #6285061.

A structure and method for fabricating a field effect transistor (FET) having improved drain to source punchthrough properties was achieved. The method utilizes the selective deposition of silicon oxide by a Liquid Phase Deposition (LPD) method to form a self-aligning implant mask. The mask is then used to implant a buried anti-punchthrough implant channel under and aligned to the gate electrode of the FET. The buried implant reduces the depletion width at the substrate to source/drain junction under the gate electrode but does not increase substantially the junction capacitance under the source/drain contacts, thereby improving punch-through characteristic while maintaining device performance.

  Recently Added Patents
Barrier layers comprising Ni-inclusive ternary alloys, coated articles including barrier layers, and methods of making the same
Maintenance guidance display device, maintenance guidance display method, and maintenance guidance display program
Method and apparatus for triggering expiration of a data tag device
Plasma panel based radiation detector
Identifying a characteristic of an individual utilizing facial recognition and providing a display for the individual
Selecting from a plural of energy saving modes
System and method for managing self-refresh in a multi-rank memory
  Randomly Featured Patents
Histone deacetylase inhibitors based on alpha-ketoepoxide compounds
Flying ski
Hydrocarbon hydrogenation catalyst composition, a process of treating such catalyst composition, and a process of using such catalyst composition
Mirror with internal support plate
Falling safeguard device
Glow stick multi-purpose safety device
Method and apparatus for modifying an electromagnetic radiation beam
Dyeing composition for keratinous fibers comprising a dicationic diazo dye
Side sill spoiler
Method for encoding and/or decoding multimensional and a system comprising such method