Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Structure and method for fabricating a field effect transistor with a self-aligned anti-punchthrough implant channel










Image Number 3 for United States Patent #6285061.

A structure and method for fabricating a field effect transistor (FET) having improved drain to source punchthrough properties was achieved. The method utilizes the selective deposition of silicon oxide by a Liquid Phase Deposition (LPD) method to form a self-aligning implant mask. The mask is then used to implant a buried anti-punchthrough implant channel under and aligned to the gate electrode of the FET. The buried implant reduces the depletion width at the substrate to source/drain junction under the gate electrode but does not increase substantially the junction capacitance under the source/drain contacts, thereby improving punch-through characteristic while maintaining device performance.








 
 
  Recently Added Patents
Generating and using checkpoints in a virtual computer system
Video stabilization
Combined imaging and radiation therapy
Light emitting device and electronic device
Optoelectronic semiconductor chip and method for manufacturing a contact structure for such a chip
Compositions and methods for inhibition of MMP13:MMP-substrate interactions
Imaging lens having five lens elements, and electronic apparatus having the same
  Randomly Featured Patents
Uninterruptible power supply apparatus and methods using a display with variable backlighting
Method and apparatus for changing flow of control in a processor
Projection exposure apparatus
Process for the production of emulsions and dispersions
Method and system for quality of service support for ethernet multiservice interworking over multiprotocol label switching
Filling system for sealing and inflating tires
Liquid crystalline ferroelectric derivatives of branched acyclic alpha-chlorocarboxylic acids
Polycyclic polyimides and compositions and methods relating thereto
Label printer
Joint rod lock