Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Structure and method for fabricating a field effect transistor with a self-aligned anti-punchthrough implant channel










Image Number 3 for United States Patent #6285061.

A structure and method for fabricating a field effect transistor (FET) having improved drain to source punchthrough properties was achieved. The method utilizes the selective deposition of silicon oxide by a Liquid Phase Deposition (LPD) method to form a self-aligning implant mask. The mask is then used to implant a buried anti-punchthrough implant channel under and aligned to the gate electrode of the FET. The buried implant reduces the depletion width at the substrate to source/drain junction under the gate electrode but does not increase substantially the junction capacitance under the source/drain contacts, thereby improving punch-through characteristic while maintaining device performance.








 
 
  Recently Added Patents
Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus
Method and apparatus for efficiently inserting fills in an integrated circuit layout
Method and apparatus to select a profile of a digital communication line
Image forming apparatus and control method therefor
Organic light-emitting display and method of manufacturing the same
Blocky hydroxyethylcellulose, derivatives thereof, process of making and uses thereof
Horizontal card holder
  Randomly Featured Patents
Faucet securing and water supply device
Health care bed frame
High pressure hose for modular fuel delivery system
System and method for calculating the directivity index of a passive acoustic array
Circuits and methods for driving flat panel displays
Error diffusion method and hardware architecture
Safety liner having a valve for a vehicle tire and method of use
Integrated communications system
Universal clamping fixture for baby carriage umbrellas
Exhaust extractor device