Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods to modify wet by dry etched via profile










Image Number 2 for United States Patent #6277757.

A method for fabricating funnel-shaped vias in semiconductor devices with an improved profile amelioration of the sharp angles at the onset of the via and at the intersection between the wet etch section (i.e., the bowl-shaped section) and the dry etch section (i.e., the straight section). The method includes the following main steps: (1) using PECVD to deposit a base dielectric layer on a wafer; (2) depositing a bottom dielectric layer on the base dielectric layer, the bottom dielectric layer having a first predetermined etch removal rate; (3) depositing at least one profile modifying dielectric layer on the bottom dielectric layer; (4) depositing a top dielectric layer on top of the at least one profile modifying dielectric layer, the top dielectric layer has a second predetermined etch removal rate, wherein the second predetermined etch removal rate is higher than the first predetermined etch removal rate; (5) forming a photoresist layer on the top dielectric layer, the photoresist layer containing an opening so as to allow a via to be formed through the multiplicity of dielectric layers; (6) using a simultaneous wet-and-dry etching process to form a funnel-shaped via in the multiplicity of dielectric layers. The dielectric layer material is selected such that its etch removal rate can be adjusted by adjusting one of the PECVD parameters.








 
 
  Recently Added Patents
Header rail for a shower screen or the like
Switchable solvents and methods of use thereof
System and methods for weak authentication data reinforcement
Light irradiation element, image forming structure, and image forming apparatus
Image forming apparatus and warming up method thereof
Automated macular pathology diagnosis in three-dimensional (3D) spectral domain optical coherence tomography (SD-OCT) images
Signal conversion control circuit for touch screen and method thereof
  Randomly Featured Patents
Method for producing multi-viewpoint image for three-dimensional image display and program therefor
System and method for holographic storage with optical folding
Client-server task distribution system and method
Process for the production of 17 .alpha.-hydroxy-3-methoxy-8,14-seco-1,3,5(10),9(11)estratetraen-14-one by reduction of the corresponding 17-one compound
Method and apparatus for heat recovery from hydraulic oil
High electron mobility transistor
Basic composite metal sulfate fiber, process for the production thereof, and composition containing the same
Cellulose dip cord produced from highly homogeneous cellulose solution and tire using the same
Use of soy products having a reduced beany flavor in meat and other food products
Fluid valves having dynamic valve trim joints