Resources Contact Us Home
Methods to modify wet by dry etched via profile

Image Number 2 for United States Patent #6277757.

A method for fabricating funnel-shaped vias in semiconductor devices with an improved profile amelioration of the sharp angles at the onset of the via and at the intersection between the wet etch section (i.e., the bowl-shaped section) and the dry etch section (i.e., the straight section). The method includes the following main steps: (1) using PECVD to deposit a base dielectric layer on a wafer; (2) depositing a bottom dielectric layer on the base dielectric layer, the bottom dielectric layer having a first predetermined etch removal rate; (3) depositing at least one profile modifying dielectric layer on the bottom dielectric layer; (4) depositing a top dielectric layer on top of the at least one profile modifying dielectric layer, the top dielectric layer has a second predetermined etch removal rate, wherein the second predetermined etch removal rate is higher than the first predetermined etch removal rate; (5) forming a photoresist layer on the top dielectric layer, the photoresist layer containing an opening so as to allow a via to be formed through the multiplicity of dielectric layers; (6) using a simultaneous wet-and-dry etching process to form a funnel-shaped via in the multiplicity of dielectric layers. The dielectric layer material is selected such that its etch removal rate can be adjusted by adjusting one of the PECVD parameters.

  Recently Added Patents
Digital microwave radio link with adaptive data rate
Information processing apparatus and method
Control apparatus and control method
Multi-dimensional credibility scoring
Antenna tuning on an impedance trajectory
Image surveillance system and method of detecting whether object is left behind or taken away
Gearbox housing
  Randomly Featured Patents
Mesomorphic compound, liquid crystal composition and liquid crystal device
Methods for treating latent tuberculosis
Method of manufacturing metal nanoparticles
Mass spectrometer
Golf ball
Nail driver construction
Facilitating presentation by mobile device of additional content for a word or phrase upon utterance thereof
Data transmission system
Fiber optic line generator suitable for use with incandescent light source
Pipeline assembling apparatus for use with large diameter pipes