Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Methods to modify wet by dry etched via profile










Image Number 2 for United States Patent #6277757.

A method for fabricating funnel-shaped vias in semiconductor devices with an improved profile amelioration of the sharp angles at the onset of the via and at the intersection between the wet etch section (i.e., the bowl-shaped section) and the dry etch section (i.e., the straight section). The method includes the following main steps: (1) using PECVD to deposit a base dielectric layer on a wafer; (2) depositing a bottom dielectric layer on the base dielectric layer, the bottom dielectric layer having a first predetermined etch removal rate; (3) depositing at least one profile modifying dielectric layer on the bottom dielectric layer; (4) depositing a top dielectric layer on top of the at least one profile modifying dielectric layer, the top dielectric layer has a second predetermined etch removal rate, wherein the second predetermined etch removal rate is higher than the first predetermined etch removal rate; (5) forming a photoresist layer on the top dielectric layer, the photoresist layer containing an opening so as to allow a via to be formed through the multiplicity of dielectric layers; (6) using a simultaneous wet-and-dry etching process to form a funnel-shaped via in the multiplicity of dielectric layers. The dielectric layer material is selected such that its etch removal rate can be adjusted by adjusting one of the PECVD parameters.








 
 
  Recently Added Patents
System and method for detecting malicious code executed by virtual machine
Non-aqueous solution process for the preparation of cross-linked polymers
Header rail for a shower screen or the like
Apparatus and methods for providing efficient space-time structures for preambles, pilots and data for multi-input, multi-output communications systems
Method and system for associating a cell-sector with time-dependent location parameters
Pyridazine compounds for controlling invertebrate pests
Message processing method and apparatus based on the SIP protocol and an IP communication system
  Randomly Featured Patents
Throttle sensor mounting structure
Tellurite glasses and optical components
Embedded substrate having circuit layer element with oblique side surface and method for making the same
Wall brush
Drill string joint
Key safe apparatus
System and method for managing calendar items
Method and system for wear testing a seat by simulating human seating activity and robotic human body simulator for use therein
Image-forming apparatus and method for evaluating gradation characteristic
Pressure control with compliant guide