Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method to solve the dishing issue in CMP planarization by using a nitride hard mask for local inverse etchback and CMP










Image Number 2 for United States Patent #6261923.

A method for forming planarized isolation using a nitride hard mask and two CMP steps is described. A first nitride layer is deposited over a pad oxide layer on the surface of a semiconductor substrate. The first nitride and pad oxide layers are etched through where they are not covered by a mask to provide at least one wide opening and at least one narrow opening where the surface of the substrate is exposed. Trenches are etched into the substrate where it is exposed. An oxide layer is deposited overlying the first nitride layer and within the trenches completely filling the narrow trench wherein a trough is formed over the wide trench. A second nitride layer is deposited over the oxide layer. The second nitride layer is polished away with a polish stop at the oxide layer whereby the second nitride layer is removed except: where it lies within the trough. The oxide layer is etched back where it is not covered by the second nitride layer wherein the oxide layer is planarized except where the oxide layer underlies the second nitride layer. The second nitride layer is removed within the trough whereby oxide horns forming the trough extend vertically upward from the planarized oxide surface. Thereafter, the oxide layer is polished away with a polish stop at the first nitride layer whereby the oxide horns are removed. The first nitride and the pad oxide layers are removed completing formation of the shallow trench isolation.








 
 
  Recently Added Patents
Image forming apparatus with enhanced display of guidance information
Configurations and methods for effluent gas treatment
Illumination apparatus
Zoom lens
Press nut
Techniques for generating and displaying a visual flow of user content through a social network
Heterogeneous language data typing without executable regeneration
  Randomly Featured Patents
Space lighting
Water-metachromatic laminate, and process for its production
Dispensing container for pharmaceutical tablets or the like
Sterically stabilized second-order nonlinear optical chromophores with improved stability and devices incorporating the same
Set of icons for a display section of a communication device
Wireless network having multiple security interfaces
Evaporator device for active substances with fan
Group delay estimate system using least square fit to phase response ramp
Preventing means for preventing an erroneous locking of a cover for a connector and electrical connection box using the same
Integrated circuit device having reduced bow and method for making same