Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming shallow trench isolations










Image Number 4 for United States Patent #6221785.

A method for forming shallow trench isolations includes the steps of defining a wafer substrate, forming a silicon dioxide insulating layer on the substrate, depositing a silicon nitride layer on the silicon dioxide insulating layer, and forming at least one trench in the substrate through the silicon dioxide and silicon nitride layers. The method also includes the steps of depositing a silicon dioxide layer over the silicon nitride layer and in the trench, removing the silicon dioxide layer deposited over the silicon nitride layer, anisotropically etching the silicon dioxide layer to produce silicon dioxide sidewalls in the trench contiguous with the silicon nitride layer, isotropically etching to remove the sidewalls and removing the silicon nitride layer.








 
 
  Recently Added Patents
Retrievable outgoing audio messaging
Mixture, especially spinning solution
Vehicle drive control system
Micromachined devices and fabricating the same
System and method for oscillator frequency control
Multi-contoured yoga support
Dyes and methods of marking biological material
  Randomly Featured Patents
High performance multi-zone illuminator module for semiconductor wafer processing
Method and apparatus for reducing amplitude variations and interference in communication signals, such as in wireless communication signals employing inserted pilot symbols
Thermodynamic kite
Methods, devices, and computer program products for generating a compressed status report that is updated to indicate later received data
Triple windrowing method and apparatus
Pry bar
Method and apparatuses for monitoring hemodynamic activities using an intracardiac impedance-derived parameter
Method and apparatus for evaluating for the purpose of decoding a bitstream having a data structure fulfilling the requirements of two different data structure standards, and storage medium co
Egg shaped shaker
Coffee filter