Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Semiconductor device and method for producing the same










Image Number 14 for United States Patent #6218299.

For example, in a plasma processing system, C.sub.4 F.sub.8 gas and C.sub.2 H.sub.4 gas are introduced as film-forming gases at flow rates of 60 sccm and 30 sccm, respectively, under the conditions of a pressure of 0.2 Pa, a microwave power of 2.7 kW, a radiofrequency power of 1.5 kW, and a wafer temperature of 350.degree. C. At the same time, a plasma gas is also introduced at a flow rate of 150 sccm to form CF film 13 having an F content of, for example, 22% on silicon substrate 11. This CF film 13 has a relative dielectric constant of 2.4.








 
 
  Recently Added Patents
Technique for manufacturing bit patterned media
Method of forming wafer level mold using glass fiber and wafer structure formed by the same
Method for inhibiting thermal run-away
High surface area composition for use in the catalytic hydroconversion of a heavy hydrocarbon feedstock, a method making such composition and its use
Pipe coupling
Carbon dioxide capture system and methods of capturing carbon dioxide
Target output device and extreme ultraviolet light source apparatus
  Randomly Featured Patents
Method of isolating a nucleic acid using a material containing an amino group and a carboxyl group and positively charged at a first pH and a solid material for nucleic acid isolation used for
Film distinguished in coriona resistant characteristic and insulated wires, coils and motors comprising the film as an insulation material
Air freshener
Portable ID card verification apparatus
Automatic tablet packing machine
Process and device for treating liquids with cation exchangers and anion exchanges
Optical fiber
Treatment of cancer using anti-Apo-2 antibodies
Pull rings for the operating levers of quick connect/disconnect couplings
Lamina stack having a plurality of outer perimeter configurations and an apparatus and method for manufacturing said stack