Resources Contact Us Home
Method of fabricating flux concentrating layer for use with magnetoresistive random access memories

Image Number 5 for United States Patent #6211090.

A method of fabricating a flux concentrator for use in magnetic memory devices including the steps of providing at least one magnetic memory bit (10) and forming proximate thereto a material stack defining a copper (Cu) damascene bit line (56) including a flux concentrating layer (52). The method includes the steps of depositing a bottom dielectric layer (32), an optional etch stop (34) layer, and a top dielectric layer (36) proximate the magnetic memory bit (10). A trench (38) is etched in the top dielectric layer (36) and the bottom dielectric layer (32). A first barrier layer (42) is deposited in the trench (38). Next, a metal system (29) is deposited on a surface of the first barrier layer (42). The metal system (29) includes a copper (Cu) seed material (44), and a plated copper (Cu) material (46), a first outside barrier layer (50), a flux concentrating layer (52), and a second outside barrier layer (54). The metal system (29) is patterned and etched to define a copper (Cu) damascene bit line (56).

  Recently Added Patents
Light emitting element, method for manufacturing the light emitting element, optical element and method for manufacturing the optical element
Printing apparatus
Distributed IPv6 neighbor discovery for large datacenter switching systems
Systems and methods for tracking mobile terrestrial terminals for satellite communications
Integrated touch screen
Plants and seeds of hybrid corn variety CH367819
Qualification screening system and screening method thereof, qualification screening device and device under qualification screening
  Randomly Featured Patents
Miscible blends of imide containing polymers with poly(aryl sulfones)
Bottle support base
Method and apparatus for driving flat screen displays using pixel precharging
Integrated molded product of a polybutylene terephthalate resin composition having silicone rubber excellently adhered thereto which concomitantly displays superior heat shock resistance
Gas exchange valve for an internal combustion engine
Radio navigation system
Steering blocking mechanism for child's toy
Heat-sealable marking labels
Interchangeable storage medium containing program for processing data files thereupon to match a data file format to a computer system
Transdermally administered acetylcysteine as mucolytic agent