Resources Contact Us Home
Method of fabricating flux concentrating layer for use with magnetoresistive random access memories

Image Number 5 for United States Patent #6211090.

A method of fabricating a flux concentrator for use in magnetic memory devices including the steps of providing at least one magnetic memory bit (10) and forming proximate thereto a material stack defining a copper (Cu) damascene bit line (56) including a flux concentrating layer (52). The method includes the steps of depositing a bottom dielectric layer (32), an optional etch stop (34) layer, and a top dielectric layer (36) proximate the magnetic memory bit (10). A trench (38) is etched in the top dielectric layer (36) and the bottom dielectric layer (32). A first barrier layer (42) is deposited in the trench (38). Next, a metal system (29) is deposited on a surface of the first barrier layer (42). The metal system (29) includes a copper (Cu) seed material (44), and a plated copper (Cu) material (46), a first outside barrier layer (50), a flux concentrating layer (52), and a second outside barrier layer (54). The metal system (29) is patterned and etched to define a copper (Cu) damascene bit line (56).

  Recently Added Patents
Method and system for blocking hazardous information
Power supply system for motor vehicle
Method, apparatus or computer program for changing from scheduled to unscheduled communication modes
Note tab
Ignition device in particular for an internal combustion engine, and method for manufacturing same
Recording medium, playback device, integrated circuit
Single-stage PFC converter with constant voltage and constant current
  Randomly Featured Patents
Platinum-nitrogen complex catalysts
Integrated emission microscope for panchromatic imaging, continuous wavelength spectroscopy and selective area spectroscopic mapping
2-(1H-indol-3-yl)-2-oxo-acetic acid amides with antitumor activity
Manufacturing method of stator, and stator
Data processing apparatus and method for correcting faulty microcode in a ROM device via a flag microinstruction in a RAM device including corrected microcode
Electroluminescent phosphor with high brightness
Adjustable dispensing stirrer for soluble sweeteners
Lighting fixture short visor
Biological electrode