Resources Contact Us Home
MONOS flash memory for multi-level logic and method thereof

Image Number 9 for United States Patent #6166410.

The present invention provides a structure and method of manufacturing split gate MONOS multi-level logic memory device. The memory device has a poly stacked gate transistor 20A in series with a MONOS transistor 24A. The device has a novel operation to achieve multi-level memory storage (e.g., 4 voltage states). The method begins by forming a tunnel oxide layer 30 on the surface of a semiconductor substrate 10. The substrate having a stacked gate channel area 20 and a MONOS channel area 24 in the active regions. A poly floating gate electrode 32 is formed over the stacked gate channel region 20. A ONO layer having a memory nitride layer is formed over the floating gate 32 and the tunnel oxide layer over the MONOS channel region 24. A control gate electrode 44 is formed over the ONO layer 41 spanning across the poly floating gate electrode 32 and the MONOS channel region 24. Source/drain regions 50 51 are formed in the substrate. A poly flash transistor 20A and a MONOS flash transistor 24A combine to form the 4 level logic memory cell of the invention.

  Recently Added Patents
Disk drive to enable defect margining
Hot-press cushion material and manufacturing method of the same
Pet urn enclosure
Methods and apparatus for monitoring communication through identification of priority-ranked keywords
Organic electroluminescent element
Dynamic association and disassociation of threads to device functions based on requestor identification
High-order harmonic device of cavity filter
  Randomly Featured Patents
Portable computer equipped with add-on battery
System and method for controlling appliances and thermostat for use therewith
Uninterruptible duplexed power supply system, and unit plug-in structure for uninterruptible duplexed power supply system
Semiconductor device and method of manufacturing the same
Bit string search apparatus, search method, and program
Integrated circuits with temperature-change and threshold-voltage drift compensation
Thermal management of electronic devices
Method, program product and apparatus for modeling resist development of a lithography process
Indicator light apparatus of marine vessel
Moveable support system for a crossover box