Resources Contact Us Home
MONOS flash memory for multi-level logic and method thereof

Image Number 7 for United States Patent #6166410.

The present invention provides a structure and method of manufacturing split gate MONOS multi-level logic memory device. The memory device has a poly stacked gate transistor 20A in series with a MONOS transistor 24A. The device has a novel operation to achieve multi-level memory storage (e.g., 4 voltage states). The method begins by forming a tunnel oxide layer 30 on the surface of a semiconductor substrate 10. The substrate having a stacked gate channel area 20 and a MONOS channel area 24 in the active regions. A poly floating gate electrode 32 is formed over the stacked gate channel region 20. A ONO layer having a memory nitride layer is formed over the floating gate 32 and the tunnel oxide layer over the MONOS channel region 24. A control gate electrode 44 is formed over the ONO layer 41 spanning across the poly floating gate electrode 32 and the MONOS channel region 24. Source/drain regions 50 51 are formed in the substrate. A poly flash transistor 20A and a MONOS flash transistor 24A combine to form the 4 level logic memory cell of the invention.

  Recently Added Patents
Information processing apparatus, information outputting method and computer program storage device
Electronic device with multi-orientation
Rotating sunlight/light beam for fractional/beneficial use
System and method of supplying an electrical system with direct current
Driver circuit for driving semiconductor switches
Techniques for distributed storage aggregation
Integrated circuit packaging system with laser hole and method of manufacture thereof
  Randomly Featured Patents
Apparatus for the cutting of foods
Process for the preparation of catalysts and for cracking mineral oil fractions
Inhibitors of vascular endothelial growth factor activity, their uses and processes for their production
Log positioning and conveying apparatus
Light operated target shooting systems
ROADM transponder aggregator systems and methods of operation
Image display medium ribs, production process thereof, and image display medium using the ribs
Integrated display and input system
Hybrid drive in a motor vehicle