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Projection and exposure apparatus including an optical member and a holding member










Image Number 9 for United States Patent #6144504.

A projection and exposure apparatus includes an optical member, a holding member for holding the optical member with a gap between the optical member and the holding member, and a powder charged in the gap between the optical member and the holding member, such that the optical member and the holding member are maintained in a spaced-apart relationship.








 
 
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