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Semiconductor device having discharging portion










Image Number 2 for United States Patent #6097045.

A semiconductor device and a fabrication method are disclosed which are capable of preventing a charge-up phenomenon which occurs during a plasma process, and the semiconductor device includes a center portion of a semiconductor device having a passing through portion and a blocking portion and formed on the center portion of the semiconductor substrate, and a peripheral portion having a pad and a discharging portion formed near the pad and connected with the ground.








 
 
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