Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Temperature probes for measuring substrate temperature










Image Number 4 for United States Patent #6079874.

An apparatus accurately measures a temperature of a substrate in a thermal processing chamber. The apparatus has a support structure to support the substrate within the thermal processing chamber. A first probe is provided with an input end positioned to receive radiation from the substrate during thermal processing. A second probe is also provided with an input end positioned to receive radiation from the substrate during thermal processing. The second probe is positioned such that it is angularly offset from the first probe so radiation provided at an output end of the second probe is out of phase with radiation provided at the output end of the first probe. A junction receives and combines radiation from the output ends of the first and second probes. The radiation is combined to provide an accurate representation of the temperature of a local region of the substrate by compensating for a temperature gradient between the support structure and the substrate.








 
 
  Recently Added Patents
Semiconductor device
Method and system for accurately converging a timing recovery mechanism and an equalizer at a receiver
Various methods and apparatuses for a route server
Display substrate and method for manufacturing the same
Connector
Projection type display device provided with a unit for detecting clogging of filters
Methods and systems for evaluating a design of an aircraft
  Randomly Featured Patents
Wide field of view and high speed scanning microscopy
Container assembly including lower compartment comprising chordal partitions
Navigator for vehicles
Container
Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology
Semiconductor memory having function to determine semiconductor low current
Liquid cleaning compositions
Image forming apparatus having charging member supplied with oscillating voltage
Knife sharpener
Medical instrument