Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Temperature probes for measuring substrate temperature










Image Number 4 for United States Patent #6079874.

An apparatus accurately measures a temperature of a substrate in a thermal processing chamber. The apparatus has a support structure to support the substrate within the thermal processing chamber. A first probe is provided with an input end positioned to receive radiation from the substrate during thermal processing. A second probe is also provided with an input end positioned to receive radiation from the substrate during thermal processing. The second probe is positioned such that it is angularly offset from the first probe so radiation provided at an output end of the second probe is out of phase with radiation provided at the output end of the first probe. A junction receives and combines radiation from the output ends of the first and second probes. The radiation is combined to provide an accurate representation of the temperature of a local region of the substrate by compensating for a temperature gradient between the support structure and the substrate.








 
 
  Recently Added Patents
Geo-coding images
Battery pouch sheet edge insulation
Antimicrobial polysiloxane materials containing metal species
Methods and systems for use in tracking targets for direction finding systems
Mobile terminal including stellar body watching hookup communications function
Printer driver, printer control method, and recording medium
Methods, apparatus, and systems for facilitating control communications between disparate devices
  Randomly Featured Patents
Hair dryer
Reactor for gas/liquid or gas/liquid/solid reactions
Fuel cell system
HARQ device and method for mobile communication system
Selective resin synthesis and dual functional resins made thereby
Injection nozzle and molding apparatus
Semiconductor structure with stable pre-reacted particle and method for making
Heater with medium-filled passive heating element
Combined coat, heat treat, quench method for gas turbine engine components
Bracing device for the blades of a saw mill, saw mill using a device of this type