Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Temperature probes for measuring substrate temperature










Image Number 4 for United States Patent #6079874.

An apparatus accurately measures a temperature of a substrate in a thermal processing chamber. The apparatus has a support structure to support the substrate within the thermal processing chamber. A first probe is provided with an input end positioned to receive radiation from the substrate during thermal processing. A second probe is also provided with an input end positioned to receive radiation from the substrate during thermal processing. The second probe is positioned such that it is angularly offset from the first probe so radiation provided at an output end of the second probe is out of phase with radiation provided at the output end of the first probe. A junction receives and combines radiation from the output ends of the first and second probes. The radiation is combined to provide an accurate representation of the temperature of a local region of the substrate by compensating for a temperature gradient between the support structure and the substrate.








 
 
  Recently Added Patents
Advertisement rotation
Caller name detection and export
System and method to manage set history for simple network management protocol
Method for processing video input by detecting if picture of one view is correctly paired with another picture of another view for specific presentation time and related processing apparatus t
Thermoelectric heat pump
Collapsible three dimensional vector demonstration and measurement device
Systems and methods for providing a vending network
  Randomly Featured Patents
Combined sheet fed rotary printing machine for securities, in particular bank-notes
Compositions including mercaptoorganopolysiloxanes and stannic salts of carboxylic acids
Dual wavelength optical fiber laser
Preparation of indole derivatives
Rotational balancing structure for an A.C. motor
Method for preparing alkoxysilane cluster compounds; resulting novel compounds; and their use as functional fluids
Pressure gas engine
Tape supplying and taking up apparatus and tape cassettes for use therewith
Multi-readable information system
Malleable cannula