Resources Contact Us Home
Temperature probes for measuring substrate temperature

Image Number 4 for United States Patent #6079874.

An apparatus accurately measures a temperature of a substrate in a thermal processing chamber. The apparatus has a support structure to support the substrate within the thermal processing chamber. A first probe is provided with an input end positioned to receive radiation from the substrate during thermal processing. A second probe is also provided with an input end positioned to receive radiation from the substrate during thermal processing. The second probe is positioned such that it is angularly offset from the first probe so radiation provided at an output end of the second probe is out of phase with radiation provided at the output end of the first probe. A junction receives and combines radiation from the output ends of the first and second probes. The radiation is combined to provide an accurate representation of the temperature of a local region of the substrate by compensating for a temperature gradient between the support structure and the substrate.

  Recently Added Patents
SONOS stack with split nitride memory layer
Information processing apparatus, method for controlling information processing apparatus, and storage medium
Methods and system for providing drug pricing information from multiple pharmacy benefit managers (PBMs)
Systems and method for automatic color plane misregistration calibration
System and method for combined I/Q generation and selective phase interpolation
Solid-state image capture device and image capture apparatus
Elastic wave device having a capacitive electrode on the piezoelectric substrate
  Randomly Featured Patents
Cabinet knob
System and method for focused navigation within a user interface
Inspection device and inspection method
Common controller
Coding method, semiconductor memory for implementing coding method, decoder for semiconductor memory and method for identification of hand-written characters
Apparatus for the magnetic induction heating of flat, rectangular metal products traveling in their longitudinal direction
Environmental control system
High magnetic flux sputter targets with varied magnetic permeability in selected regions
Methods for recovering oil from an oil reservoir
Method for remote service forwarding (RSF) between dissimilar systems with operator, service and location portability