Resources Contact Us Home
Method for manufacturing capacitor structure of dynamic memory cell

Image Number 11 for United States Patent #6025247.

A method is disclosed to manufacture a capacitor structure having a high capacitance and a flat topography on a semiconductor device. The method includes steps of: (a) forming a first insulating layer over a substrate having a transistor structure; (b) forming a first and a second contact holes on the first insulating layer; (c) forming a first conducting layer over the first insulating layer; (d) forming a bit line structure above the first contact hole; (e) forming an etching stop layer and a second insulating layer over the substrate, and removing a portion of the etching stop layer and the second insulating layer for forming a capacitor area wherein the second contact plug is exposed; (f) forming a second conducting layer over the substrate, and forming a sacrificial layer in the capacitor area for covering a portion of the second conducting layer; (g) forming the capacitor structure in the capacitor area.

  Recently Added Patents
Method for determining the local position of at least one mobile radio communication device based on predetermined local positions of adjacent radio communication devices, associated radio com
Data center with free-space optical communications
Enzymatic demethylation of flavonoids
Method and system for establishing security connection between switch equipments
Biological analysis arrangement and approach therefor
Moving structure and micro-mirror device using the same
Piezoelectric quasi-resonance linear motors based on acoustic standing waves with combined resonator
  Randomly Featured Patents
Priority remapping for data communication switch
Electric multi-pencil sharpener
Providing multiple faults protection for an array of storage devices
Digital camera
FLASH-based memory system with static or variable length page stripes including data protection information and auxiliary protection stripes
Travel control method of electric vehicle
Lubricating rubber composition
Movable partition system having a rail, and a rail for a carriage for a movable partition, and a method for use of a movable partition system having a rail
Method of forming a high efficiency respirator
Frequency detector