Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Multicast address learning in an input/output adapter of a network processor
Fabrication technique for gallium nitride substrates
Method and system for fault protection using a linear feedback shift register
Apparatus and method for recording a maintenance pattern
Drawer for holding beverage cartridges
Vapor-phase growth method for semiconductor film
Printer for receiving direct printer requests and mapping features of the requests to required settings
  Randomly Featured Patents
Manual sensing of wire guidance signal
Method and apparatus for preventing compressor failure due to loss of lubricant
Document transmission and routing with recipient control useful for facsimile document transmission and routing
Method and apparatus for slicing elongated food articles into slabs and transferring the slabs to containers
Mailing form for non-impact printing
Simultaneous dual polarization radar system with optical communications link
Electron emission display (EED) device with variable expression range of gray level
Optical information recording media and optical information read/write device
High-efficiency single-ended inverter circuit
Stretch head for facilitating wrapping palletized loads