Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a high performance bipolar structure










Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.








 
 
  Recently Added Patents
Method and apparatus for connecting signal lines of multiple layers to certain contacts while preventing connections with other contacts
Electronic device with a screen
Method and apparatus for predicting object properties and events using similarity-based information retrieval and modeling
Cytokine biomarkers as predictive biomarkers of clinical response for Glatiramer acetate
Reduction of HMF ethers with metal catalyst
Rotating-body electrification mechanism, image carrier unit, process cartridge, image forming apparatus, and method for electrifying image carrier unit
Dual source mass spectrometry system
  Randomly Featured Patents
Self-deposited coatings on magnesium alloys
Use of LTB4 antagonists in veterinary medicine
Mask-making using resist having SIO bond-containing polymer
MOS transistor with semi-insulating field plate and surface-adjoining top layer
Method and apparatus for interconnecting content addressable memory devices
Submerged-surface cleaning apparatus with angled filtration system
Parallel methods for genomic analysis
Electrophotographic image recording apparatus
Muzzle loader
Beverage clouding system and method