Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
System of providing an internet web site that assists medical professionals draft a letter of medical necessity or other documentation for transmission to a third party payer on behalf of a pa
Control method of LPI lamp for LPI vehicle and logic therefor
Qualification screening system and screening method thereof, qualification screening device and device under qualification screening
Architectural panel with bamboo rings heavy density embossed surface
Sparse data compression
Method for dropping packet data, radio communication device, and mobile communication system
Feedback method and processing system for policy installation failures
  Randomly Featured Patents
Planar diaphragm acoustic loudspeaker
Child's automotive safety seat
Golf grip cover
Soldering flux composition
Acceleration controlling device for an automobile vehicle
Substituted phenoxybenzoic acids compositions of the same and herbicidal use thereof
Dispatch board system
Optical waveguide mounted substrate and method of producing the same
Method for operating an internal combustion engine to transmit power to a driveline