Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Credit flow control scheme in a router with flexible link widths utilizing minimal storage
Fluorescent dyes, fluorescent dye kits, and methods of preparing labeled molecules
Drinking glass with ball embedded in base
Lithographic apparatus and device manufacturing method
Accelerator for a read-channel design and simulation tool
Combining seismic data from sensors to attenuate noise
Information processing apparatus, method for controlling information processing apparatus, and storage medium
  Randomly Featured Patents
Exhaust backpressure tester
Drip shield and thermal insulation cover
Method for inhibiting allograft rejection by the administration of 6-azauridine or its triacetate derivative
Suction catheter and suction-catheter system
Golf ball with large inner core
Pesticidal tris-oximino heterocyclic compounds
Lighting device, display device and television receiver
Step-down skeletal muscle energy conversion system
Clothing hanger
Calibration for phase-locked loop