Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Communication device and two-dimensional communication system using the same
Global codebook for coordinated multi-point processing
Method and apparatus to adjust received signal
Pizza stone
Sensor packages and method of packaging dies of differing sizes
System and method for transferring data in storage controllers
Fluorescent dyes, fluorescent dye kits, and methods of preparing labeled molecules
  Randomly Featured Patents
Data storage device
Printed wiring board and method for producing the same
Oven door assembly incorporating overlay member
Method and apparatus for improving asynchronous transfer mode operation over noisy, high speed wireless links
Snowmobile track lugs
Self governing fluid energy turbine
Speed control device of sewing machines
Board mount
Simple inspection device for analyzer for ionic activity measurment
Electronic ballast with lamp power regulation and brownout accommodation