Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Architectural panel with millet and grass
Systems and method for automatic color plane misregistration calibration
Radio communication device and sequence length adjusting method
Disk drive increasing capacity by adjusting a servo gate during write operations
MRAM with sidewall protection and method of fabrication
Circuit board having semiconductor chip embedded therein
Single-chain variable fragment (scFv) able to recognize and bind CD99 human protein
  Randomly Featured Patents
Method, apparatus and blank for packing at least one article in a self-supporting wrapping having the shape of a rectangular parallelepiped
Communication system for authenticating or relaying network access, relaying apparatus, authentication apparatus, and communication method
Fax mail apparatus
Guitar stand
Apparatus for pressure sensing
Intergrated circuit element having a planar, solvent-free dielectric layer
Method and apparatus for predicting destruction of a rolling bearing
Ethanol synthesis by homologation of methanol
Method and code module for adding function to a web page
Slide device for vehicle