Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 6 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Switching element for a valve train of an internal combustion engine
Method and apparatus for power management control of an embedded memory having sleep and shutdown features
Externally gapped line arrester
Light emitting diode having multi-cell structure and method of manufacturing the same
Methods and systems for creating a tail risk hedge index and trading derivative products based thereon
Dual source mass spectrometry system
Structural plasticity in spiking neural networks with symmetric dual of an electronic neuron
  Randomly Featured Patents
Apparatus for locating a pair of eyeglasses
Piezoelectric acoustic transducer
Razor cartridge with shaving aid
Liquid crystal display device
Over-door shoe racks
Magnetic resonance imaging coil having vest support structure
Cable and pulley weightlifting system apparatus
Silver halide color photographic light-sensitive material
Dielectric structure for anti-fuse programming element
Image forming method and apparatus with automatic skew control