Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a high performance bipolar structure










Image Number 11 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.








 
 
  Recently Added Patents
Sound producing apparatus for vehicle
Water bottle warning triangle
Image processing apparatus, image processing method, and program
Modulation of HSP47 expression
Encoder that optically detects positional information of a moving body from different optical paths lengths
6-O-substituted benzoxazole and benzothiazole compounds and methods of inhibiting CSF-1R signaling
Method and apparatus for policy-based network access control with arbitrary network access control frameworks
  Randomly Featured Patents
Surgical instrument handle
Tooling die insert and rapid method for fabricating same
Interlocking two can connector for furniture, toys or the like
Physical exerciser
Vibratory driving device
Fibre-reactive dyestuff containing a bis-triazinylamino
Quick release clamp assembly
Display apparatus having innovative array substrate
Tire with removable tire tread belt and improved apex design
Pilot-controlled valve for braking or speed limitation in a hydraulic circuit