Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 11 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Semiconductor device
Methods and systems to reduce a number of simulations in a timing analysis
Writing implement
Dynamic allocation of access channels based on access channel occupancy in a cellular wireless communication system
Optoelectronic semiconductor chip and method for manufacturing a contact structure for such a chip
Image forming apparatus and job request control method instructed by authenticated users
  Randomly Featured Patents
Thermal barrier
Multi-resolver rotation angle sensor with integrated housing
Ink tank and ink jet recording apparatus having the ink tank
Devices for depolarizing polarized light
Method for standardizing an ink jet recording head and an ink jet recording head for attaining such standardization, ink jet recording method, and information processing apparatus, and host ap
Plant growth media and processes for production thereof and compositions for use therein
Forming metal foam structures
Data communication systems and bridges
Method and device for driving AC type PDP