Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a high performance bipolar structure










Image Number 11 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.








 
 
  Recently Added Patents
Case for electronic device
Attribute information providing system
Switchgear and method for operating switchgear
Managing delivery of application server content
Phase-amplitude 3-D stereo encoder and decoder
Base station apparatus and method for use in mobile communication system
Analysis of methylation using nucleic acid arrays
  Randomly Featured Patents
Screen processing apparatus, information processing method, and computer program product
Pipe positioner boom and head assembly for pipe laying frame
Coupler knuckle contour
Patterns having horizontal and vertical wells
Adhering metal to glass
Integrated circuit design with delayed cell selection
Transmission line connection structure, high frequency module, and communication device
Optical star coupler for plastic optical fibers
Soldering apparatus and soldering method
Homogeneous, ductile brazing foils