Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a high performance bipolar structure










Image Number 11 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.








 
 
  Recently Added Patents
Method and device for detecting the dysfunction of a gas pressure sensor in a vehicle tire
System and method for providing a path avoidance feature in a network environment
Soybean EF1A promoter and its use in constitutive expression of transgenic genes in plants
(4940
Fuel cell module, manufacturing method thereof and unit containing several of the latter
System and method for multi-threaded MIMO OFDM channel equalizer
Methods and apparatus for imaging in conjunction with radiotherapy
  Randomly Featured Patents
Tissue moisturizing and antimicrobial compositions
Polyimide foams
Plastic bag dispenser
Polarization independent all-optical regenerators
Crankcase scavenged two-stroke engines
Well bore electric pump power cable connector for multiple individual, insulated conductors of a pump power cable
Process for recovering ethylene-vinyl acetate copolymers from an aqueous dispersion
Method and system for multiplexed transport interface between demodulators (DEMODS) and set-top box (STB) system-on-chips (SoCs)
Method for programming a nonvolatile memory
Wiring substrate features having controlled sidewall profiles