Resources Contact Us Home
Process for producing a high performance bipolar structure

Image Number 11 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.

  Recently Added Patents
Transfer of digital data through an isolation
Acceleration based mode switch
Systems and methods for sorting particles
5-HT.sub.3 receptor modulators, methods of making, and use thereof
Small molecule inhibitors of kynurenine-3-monooxygenase
Pelvic registration device for medical navigation
Squib control circuit
  Randomly Featured Patents
RNA interference mediated inhibition of gene expression using chemically modified short interfering nucleic acid (siNA)
Preceramic compositions and ceramic products
Inkjet recording ink, ink cartridge, inkjet recording apparatus, and ink recorded matter
Method of analyzing coenzyme Q-10 and two-electron reduction product thereof and analysis system
Concrete anchor bolt
System for constructing and loading a table data structure based on an associated configuration data
Dicing-die bonding film
Foot actuated, anti-slamming, toilet seat raising and lowering device
Apparatus for guiding X-rays
Rotary machine