Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Process for producing a high performance bipolar structure










Image Number 11 for United States Patent #6004855.

A process for producing a small shallow-depth high-performance bipolar structure having low parasitic capacitance is disclosed wherein an active base region of a P-type material is first defined in a substrate, a portion of which is of N-type material in a device formation area surrounded by an isolating oxide regions, such as trenches or the like. An N-doped polysilicon layer is then defined over the active base region and over field oxide regions located atop the isolating trenches. This N-poly region, when treated, will provide an interdigitated collector with self aligning emitter region aligned over the active base region. After appropriate spaced isolation layers are placed, a P-poly layer is laid down and heat treated to cause the P-type doping material to diffuse into the substrate contact to the active base region. A thin buried collector layer, approximately 1.5- to 2-micron thick, can be used as a result of the combination of an interdigitated collector design and a thin epitaxial region in which the active base is located; this combination contributing to a low effective collector resistance that compensates for the increased resistance associated with a thinner buried collector layer. The process provides for collector contacts in close proximity to the active device region permitting fabrication of a small device with very low parasitic capacitance.








 
 
  Recently Added Patents
Apparatus and method for multiple pagings in broadband wireless communication system
Cantilevered probe detector with piezoelectric element
Real ear measurement system using thin tube
Optimized delivery of web application code
Method for implementing dynamic pseudorandom keyboard remapping
Laser receiver for detecting a relative position
Wireless control system for a patient support apparatus
  Randomly Featured Patents
Probe for measuring a local angle of attack and method implementing same
Method and system for defining geometric relations in a computer aided design system
Vehicle light system
Tool sharpening fixture for a grinding tool
Laminated film packages
Hydro-therapy device
Plasma ion mass analyzing apparatus
Ground electrodes for ignition plugs
Apparatus and method of diagnosing machinery damage factor
Special effects cloud generation system