Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming cornered images on a substrate and photomask formed thereby










Image Number 14 for United States Patent #5959325.

A method for forming square shape images in a lithographic process is disclosed wherein a first plurality of lines running in a first direction is defined in a first, usually sacrificial, layer, and then a second resist is defined wherein the lines run in an intersecting pattern to those of the first layer, thereby creating cornered images wherever the first and second layer intersect and in the open areas between the lines. Methods are proposed for developing the square intersecting areas and the square angle areas defined by the openings. Additionally, a photomask is disclosed in which the length and width of the cornered images are independently patterned using the two-exposure process.








 
 
  Recently Added Patents
Sacrificial spacer approach for differential source/drain implantation spacers in transistors comprising a high-k metal gate electrode structure
Oscillator circuit which compensates for external voltage supply, temperature and process
Triple-action pest control formulation and method
Pixel structure of organic light emitting device
Fast base station switching method and system, and hierarchical zone-based fast handoff approach
AC/DC converter
Resist composition and method for producing resist pattern
  Randomly Featured Patents
Brake shoe for a bicycle
Ink jet printing process
Graft fixation using a plug against suture
Transferring voice over an asymmetric digital subscriber line
Hydrostatically supported roll
Capacitor with aluminum oxide and lanthanum oxide containing dielectric structure and fabrication method thereof
Batters' shin and ankle guard
Process for producing lysophospholipids containing substantially no lysophospholipids except LPC
Ajuvants for rectal delivery of drug substances
Method for selectively initiating/terminating a test mode in an address multiplexed DRAM and address multiplexed DRAM having such a capability