Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming cornered images on a substrate and photomask formed thereby










Image Number 14 for United States Patent #5959325.

A method for forming square shape images in a lithographic process is disclosed wherein a first plurality of lines running in a first direction is defined in a first, usually sacrificial, layer, and then a second resist is defined wherein the lines run in an intersecting pattern to those of the first layer, thereby creating cornered images wherever the first and second layer intersect and in the open areas between the lines. Methods are proposed for developing the square intersecting areas and the square angle areas defined by the openings. Additionally, a photomask is disclosed in which the length and width of the cornered images are independently patterned using the two-exposure process.








 
 
  Recently Added Patents
State control of remote hosts for management of distributed applications
Electric connection box
Fire detector
Managing aging of silicon in an integrated circuit device
Extensible framework for client-based active network measurement
Tap initialization of equalizer based on estimated channel impulse response
Controlling transmission resources in mobile radio systems with dualtransfer mode
  Randomly Featured Patents
Optical projection exposure method and system using the same
Etching process, color selecting mechanism and method of manufacturing the same
Write accessibility for electronic paper
Method of manufacturing flexible semiconductor assemblies
Launch tube antenna
Electric power steering control system
Sample for measuring alignment axis for liquid crystal display, method of manufacturing sample, and method of measuring alignment axis
Methods and systems for managing composite data files
Fastening plate for the fastening of a fitting, e.g. a hinge arm, to a supporting wall
Lighter with delayed gas release