Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Method for forming cornered images on a substrate and photomask formed thereby










Image Number 14 for United States Patent #5959325.

A method for forming square shape images in a lithographic process is disclosed wherein a first plurality of lines running in a first direction is defined in a first, usually sacrificial, layer, and then a second resist is defined wherein the lines run in an intersecting pattern to those of the first layer, thereby creating cornered images wherever the first and second layer intersect and in the open areas between the lines. Methods are proposed for developing the square intersecting areas and the square angle areas defined by the openings. Additionally, a photomask is disclosed in which the length and width of the cornered images are independently patterned using the two-exposure process.








 
 
  Recently Added Patents
Photolabile dinitroindolinyl based compounds
Wall mounting system
Telephone relay apparatus, telephone relay system, recording medium and data processing method
Overlay transport virtualization
Wall structure using bearing wall panel for wooden building and construction method thereof
Apparatuses and methods for storing and/or filtering a substance
Transaction processing system
  Randomly Featured Patents
Preparation and use of solidified oils
Six-speed powertrain of an automatic transmission
Resuscitation valve
Fire and water resistant expansion and seismic joint system
Method and apparatus for deep sea mining
Flame retardant filled polypropylene compositions containing carbon black and a cured intumescent flame retardant (IFR)
Candle snuffer
Bottle
Mobile phone companion apparatus to provide voice link with land-line house telephone
Method for counting people passing through a gate