Resources Contact Us Home
Model based temperature controller for semiconductor thermal processors

Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.

  Recently Added Patents
Systems and methods for providing a vending network
Enhanced customer interaction channel systems and methods
Bending device
Leg release assembly for a cot
Apparatus and method for processing audio signals recorded on a medium
Processing packet flows
Method and apparatus for modulation and layer mapping in a wireless communication system
  Randomly Featured Patents
Hook for drill
Phytosanitary composition, method of preparing same and use thereof, especially combatting weeds
Flame retardant non-dripping polycarbonate compositions exhibiting improved thick section impact
Connector and optical transmission apparatus
Electrical connector
Combustion-powered tool fuel heating system
Computer input device with a self-contained camera
Erectable shelter
System and method for georeferencing maps
Float actuated water control valve