Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Model based temperature controller for semiconductor thermal processors










Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.








 
 
  Recently Added Patents
Advertising apparatus
Determining ill conditioning in square linear system of equations
Vanilloid receptor ligands and use thereof for the production of pharmaceutical preparations
System and method for providing advertising content using a group training system
Re-establishing push notification channels via user identifiers
Mobile interactive kiosk method
Metal halide lamps with fast run-up and methods of operating the same
  Randomly Featured Patents
Binaural feedforward-based ANR
Process for producing phenol and methyl ethyl ketone
Fluorescence detection
Fish-holding arrowhead
Children's toilet training chair
Method and system for transmitting data among various memory units of position measuring devices
Touch probe
Vending machine with electronic payment media
Agent and method for treating cancer comprising strontium, amino acid(s) and mineral agent(s)
Spray apparatus with multiple pressurizable tank liquid supply system