Resources Contact Us Home
Model based temperature controller for semiconductor thermal processors

Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.

  Recently Added Patents
Image forming apparatus, control method of image forming apparatus, and storage medium
Scoring records for sorting by user-specific weights based on relative importance
Soybean cultivar CL1013665
Mobile terminal
Suspension with flexure having laminated structure and bonding pads on opposing surfaces thereof, and head gimbal assembly and disk drive unit with the same
Dye sensitised solar cell
Image-capturing device and projection automatic calibration method of projection device
  Randomly Featured Patents
Malaria immunogenic composition
Systems, devices, and methods for automation and energy management
Process for the construction of a drain system
Yieldable mine roof support
Copying apparatus for sheet originals and thicker originals
Laser assisted wire end forming process
Steam mop
Edible coating composition and method of preparation
Filtering sensor data to reduce disturbances from force feedback
Assembly component for a disc brake