Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Model based temperature controller for semiconductor thermal processors










Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.








 
 
  Recently Added Patents
Display device and method of repairing display device
Measurement protocol for a medical technology apparatus
Image forming apparatus with enhanced display of guidance information
Account managing device, image processing system, and storage medium
Apparatus for preventing overcharge of a battery
Request routing based on class
Method for cutting C--Mn steel with a fiber laser
  Randomly Featured Patents
Induced vibration dynamic touch sensor system and method
Storage cabinet
Free game bonus round for gaming machines
Child-resistant package
Document classification apparatus
Shallow source and drain architecture in an active region of a semiconductor device having a pronounced surface topography by tilted implantation
Multimedia collaboration system
Thickener-rheology modifier system for personal care compositions
Processing method for planetary erosion
Animal hair confinement enclosure