Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Model based temperature controller for semiconductor thermal processors










Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.








 
 
  Recently Added Patents
System and method for parallel video processing in multicore devices
Method for producing carrier on which microorganisms capable of conducting multiple parallel mineralization are immobilized, column reactor and solid medium for cultivating plants
Electrical connector
Method and apparatus for re-routing calls in a packet network during failures
Magnetic detection of small entities
Catalytic pyrolysis using UZM-44 aluminosilicate zeolite
Soybean EF1A promoter and its use in constitutive expression of transgenic genes in plants
  Randomly Featured Patents
Method of noise reduction for an ADPCM signal
Articulated joint protector
Dumbbell lifting apparatus
Mark detector, drive controller, belt drive unit, and image forming apparatus
Method of adhering a decorative sheet on a hollow structure
Synchronous system and method for processing a packet
Linear motor, moving stage system, exposure apparatus, and device manufacturing method
Testing of pressure sensor in surgical cassette
Mounting apparatus for data storage device
Sandwiched radiopaque marker on covered stent