Resources Contact Us Home
Model based temperature controller for semiconductor thermal processors

Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.

  Recently Added Patents
Mobile X-ray device
Display apparatus
Through-substrate via for semiconductor device
Method and system for direct electric heating of a pipeline
Image processing device and image processing method
Solid state light sources with common luminescent and heat dissipating surfaces
Fabrication method of semiconductor device
  Randomly Featured Patents
Process for removal of carbonyl sulfide from hydrocarbons
Electrical connector having terminals and retainer for protecting the terminals during transportation
Synthetic-speech calculators
Pull tab for a slide fastener
Data processing device with a keyboard having pop-up keys
Seedless barrier layers in integrated circuits and a method of manufacture therefor
Ceramic multilayer substrate
Door security device
Table mount for a swivel arm for data processing equipment