Resources Contact Us Home
Model based temperature controller for semiconductor thermal processors

Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.

  Recently Added Patents
Method for restricting the use of an application program, system for authenticating the user of a measuring apparatus, authentication server, client apparatus and storage medium
Method and system for enabling rendering of electronic media content via a secure ad hoc network configuration utilizing a handheld wireless communication device
Warm air generating apparatus, sheet feeding apparatus, and image forming apparatus including warm air generating apparatus and sheet feeding apparatus
Atmospheric treater with roller confined discharge chamber
Universal handle extension for unloading butterfly valve for tank trailer or other vehicle
Phase-amplitude 3-D stereo encoder and decoder
Microcapsules, their use and processes for their manufacture
  Randomly Featured Patents
Method and system for locating a portable medical device
Dual floating gate EEPROM cell array with steering gates shared by adjacent cells
Automotive windshield display projector
Circuit for reading a line-transfer photosensitive device, a line-transfer photosensitive device incorporating said circuit and a method for reading said device
Method of attaching a fastening element to a panel
Video decoding apparatus and video decoding method
Method and access point for allocating whitespace spectrum
Balancer of engine, engine, and outboard motor
Device for continuous controlling of the contents of hermetically sealed containers
Image record/playback apparatus including a photographing device and a connectable playback device