Resources Contact Us Home
Model based temperature controller for semiconductor thermal processors

Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.

  Recently Added Patents
Mitigating single point failure of devices in an analyte monitoring system and methods thereof
Analog-to-digital converter with input voltage biasing DC level of resonant oscillator
Use of a high-oleic and high-tocol diet in combination with a non-tocol antioxidant for improving animal meat quality
Quick mounting device
Use of tris(hydroxymethyl) aminomethane for the stabilization of peptides, polypeptides and proteins
Single mode optical fiber with improved bend performance
Personalized location information for mobile devices
  Randomly Featured Patents
Objective lens for use with information storage disks
Implanted medical device telemetry using integrated thin film bulk acoustic resonator filtering
Array type light-emitting device with high color rendering index
Plugging device for a bottle, notably a scent bottle
High expansion ratio stent
Momentum biased active three-axis satellite attitude control system
Device for automatically storing biological or chemical samples
Method of manufacturing semiconductor device
Method for wavelength assignment in a WDM network
Lumbar traction device