Resources Contact Us Home
Model based temperature controller for semiconductor thermal processors

Image Number 3 for United States Patent #5895596.

Controllers and associated methods for controlling a thermal reactor or other thermal semiconductor processors which include a heating element powered by a power source, and having profile thermocouples and spike thermocouples. One preferred method comprises the following steps: modeling thermal dynamic characteristics of the thermal reactor, the modeling step including providing thermocouple instrumented wafers in the thermal reactor, perturbing the thermal reactor by controlling the heating element using a stimulation sequence, and developing models based on changes in temperature created by the perturbations. The models are developed off-line and can include one or more models, such as a model of power versus spike thermocouple readings, a model of spike thermocouple readings versus profile thermocouple readings, and a model of profile thermocouple readings versus thermocouple instrumented wafer readings. On-line models are further derived and used during operation to control power input to the zones of the thermal processor using measured profile and spike temperatures. The models can be cascaded or selectively activated to achieve different control regimes.

  Recently Added Patents
Semiconductor device and method of manufacturing the same
Driver circuit for driving semiconductor switches
Vacuum cleaner filter adapter ring
Method and system for associating a cell-sector with time-dependent location parameters
Magnetic reading and writing device
Resist underlayer film forming composition for lithography, containing aromatic fused ring-containing resin
Electrical installation arrangement
  Randomly Featured Patents
Car charger
Medication alarm
Semiconductor device
Ladder and method of construction therefor
Film pressure structure for an elongated exposure station of a camera
Electrical plug connector, electrical socket connector, electrical plug and socket connector assembly
Massage and skin suction apparatus
System and a process for producing at least one hydrocarbon fuel from a carbonaceous material
Magnetic printer
System and method for performing discrete simulation of ergonomic movements