Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Formation of a self-aligned integrated circuit structures using planarization to form a top surface










Image Number 4 for United States Patent #5851916.

A improved method is provided for forming self-aligned integrated circuit structures, particularly self-aligned contact structures, by providing, on a substrate, raised structures each including an outermost protective layer, and each having a horizontal upper surface extending between substantially vertical lateral surfaces, said horizontal upper surface being horizontal over the entire area therebetween. An etchable layer is formed over and between said raised structures. A photoresist layer is formed on said etchable layer and patterned. Said etchable layer is then anisotropically etched selective to said protective layer to remove said etchable layer from between selected of said raised structures, said horizontal upper surfaces substantially preventing etching at top outer edges of said raised structures and preserving thereby the integrity of the protective layers. A fill layer is then deposited to fill between said selected of said raised structures, forming thereat structures that are self-aligned to said selected of said raised structures.








 
 
  Recently Added Patents
Method of operating an election ballot printing system
Polyester resin for toner, electrostatic charge image developing toner, electrostatic charge image developer, toner cartridge, process cartridge, image forming apparatus, and image forming met
Commissioning incoming packet switched connections
Method and structure for adding mass with stress isolation to MEMS structures
Method, apparatus and computer program product for providing metadata entry
Inhibition of HRP-3 using modified oligonucleotides
Scissors
  Randomly Featured Patents
Apparatus and method for Viterbi decoding
Soybean cultivar 0332142
Auxiliary article compartment for a pickup truck, including a retractable cargo cover
High temperature transducers and methods of fabricating the same employing silicon carbide
Toy building element
Fastener for hernia mesh fixation
Method for improving the selectivity of 1,3-cyclohexanedione herbicide
Treatment of pulmonary hypertension with carbonic anhydrase inhibitors
Method for classifying multi-parameter data
Fused 7-membered cyclic compound and antipsychotic preparation containing the same