Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Formation of a self-aligned integrated circuit structures using planarization to form a top surface










Image Number 4 for United States Patent #5851916.

A improved method is provided for forming self-aligned integrated circuit structures, particularly self-aligned contact structures, by providing, on a substrate, raised structures each including an outermost protective layer, and each having a horizontal upper surface extending between substantially vertical lateral surfaces, said horizontal upper surface being horizontal over the entire area therebetween. An etchable layer is formed over and between said raised structures. A photoresist layer is formed on said etchable layer and patterned. Said etchable layer is then anisotropically etched selective to said protective layer to remove said etchable layer from between selected of said raised structures, said horizontal upper surfaces substantially preventing etching at top outer edges of said raised structures and preserving thereby the integrity of the protective layers. A fill layer is then deposited to fill between said selected of said raised structures, forming thereat structures that are self-aligned to said selected of said raised structures.








 
 
  Recently Added Patents
Tools and methods for yield-aware semiconductor manufacturing process target generation
Group control method for machine type communication and mobile communication system using the method
Radio transmitter and radio receiver with channel condition assessment
Method and apparatus for triggering expiration of a data tag device
Method for producing carrier on which microorganisms capable of conducting multiple parallel mineralization are immobilized, column reactor and solid medium for cultivating plants
Anti-infective agents and uses thereof
Candle holder
  Randomly Featured Patents
Device for imaging radiation
Indanyl-piperazine compounds
Apparatus for monitoring a schedule for testing a fuel cell
Case containing a magnetic disc for recording of still pictures
Surface for supporting cut fruit in fruit juicer
Remote controller
Control sequencer with dual microprogram counters for microdiagnostics
Keychain pendant with hinged cover
Solid calcium phosphate materials
Personal item carrier