Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Formation of a self-aligned integrated circuit structures using planarization to form a top surface










Image Number 3 for United States Patent #5851916.

A improved method is provided for forming self-aligned integrated circuit structures, particularly self-aligned contact structures, by providing, on a substrate, raised structures each including an outermost protective layer, and each having a horizontal upper surface extending between substantially vertical lateral surfaces, said horizontal upper surface being horizontal over the entire area therebetween. An etchable layer is formed over and between said raised structures. A photoresist layer is formed on said etchable layer and patterned. Said etchable layer is then anisotropically etched selective to said protective layer to remove said etchable layer from between selected of said raised structures, said horizontal upper surfaces substantially preventing etching at top outer edges of said raised structures and preserving thereby the integrity of the protective layers. A fill layer is then deposited to fill between said selected of said raised structures, forming thereat structures that are self-aligned to said selected of said raised structures.








 
 
  Recently Added Patents
Stacked structure and stacked method for three-dimensional chip
Monitoring apparatus for monitoring communication configurations of client devices
Bipolar transistor with diffused layer between deep trench sidewall and collector diffused layer
Wafer recycling method
Semiconductor device and method of forming discontinuous ESD protection layers between semiconductor die
Method and apparatus for controlled reoxygenation
Weak acid recovery system for ethanol separation processes
  Randomly Featured Patents
Round paint container
Combined bidet toilet seat and cover
Bonding of aluminium alloys
Acoustic tumor detection using stacked derived-band ABR amplitude
Zone selective interlocking test method and apparatus, and circuit interrupter apparatus and power distribution system including the same
Hinge and roller support device for sectional door
Axial bearing having independent pads for a centrifugal pump
Color television signal generator
Self contained boiler sensor
Output driver device for integrated circuit