Resources Contact Us Home
Formation of a self-aligned integrated circuit structures using planarization to form a top surface

Image Number 2 for United States Patent #5851916.

A improved method is provided for forming self-aligned integrated circuit structures, particularly self-aligned contact structures, by providing, on a substrate, raised structures each including an outermost protective layer, and each having a horizontal upper surface extending between substantially vertical lateral surfaces, said horizontal upper surface being horizontal over the entire area therebetween. An etchable layer is formed over and between said raised structures. A photoresist layer is formed on said etchable layer and patterned. Said etchable layer is then anisotropically etched selective to said protective layer to remove said etchable layer from between selected of said raised structures, said horizontal upper surfaces substantially preventing etching at top outer edges of said raised structures and preserving thereby the integrity of the protective layers. A fill layer is then deposited to fill between said selected of said raised structures, forming thereat structures that are self-aligned to said selected of said raised structures.

  Recently Added Patents
Method of transmitting and receiving a paging message in a mobile communication system
Herbicide composition having improved effectiveness, method of preparation and use
Modified binding proteins inhibiting the VEGF-A receptor interaction
Scalable encoding apparatus, scalable decoding apparatus, scalable encoding method, scalable decoding method, communication terminal apparatus, and base station apparatus
Image descriptor quantization
Dental composition, kit of parts and use thereof
Systems and methods for classifying electronic information using advanced active learning techniques
  Randomly Featured Patents
Herbicidal composition
Three-dimensional structure of the APOBEC 2 structure, uses thereof, and methods for treating chronic and infectious diseases
System and method for provisioning broadcast and multicast services in a wireless network
Apparatus for producing metal zirconium by the reduction of zirconium tetrachloride
Multiple label liquid container
Tractor-trailer electrical connector system
Muscosal delivery systems for treatment of periodontal disease
Signals communication apparatus
Pull-resistant cylinder lock