Resources Contact Us Home
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement

Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.

  Recently Added Patents
Periodic system wakeup to update state
Light sensing circuit, backlight control apparatus having the same, and liquid crystal display device having the same
System and method for use in replaying software application events
Semiconductor device
Seizure detection using coordinate data
Ratchet wrench
Method for manufacturing an oxide-based semiconductor thin film transistor (TFT) including out diffusing hydrogen or moisture from the oxide semiconductor layer into an adjacent insulating lay
  Randomly Featured Patents
Device for career selection
Heterocyclic-cyclic amine derivatives
Optical sensing of measurands
N-(aryl/heteroaryl/alkylacetyl) amino acid amides, pharmaceutical compositions comprising same, and methods for inhibiting .beta.-amyloid peptide release and/or its synthesis by use of such co
Air cleaner arrangements; components; and, methods
Utensil for removing twist-off lids of containers
Finger loop ergonomic handle construction for a wrench
Antithrombogenic article containing lysozyme and heparin adsorbed on a substrate
Gas scrubber and method
Apparatus and a method for the extrusion of moulding from a cross-linkable polymer material