Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement










Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.








 
 
  Recently Added Patents
Wrench
Reframing circuitry with virtual container drop and insert functionality to support circuit emulation protocols
System and method for detecting crop rows in an agricultural field
Method and system for monitoring service quality in a mobile node
Method and apparatus for communications
Methods of fabricating semiconductor device
Detection and use of low molecular-weight modulators of the cold-menthol receptor TRPM8
  Randomly Featured Patents
Information media processing device
Vise with workpiece hold down force
Process for reducing surface melt fracture during extrusion of ethylene polymers
Headphone
Pesticide solution
Charged-particle beam exposure method and apparatus
Method of and apparatus for adjusting ignition timing by rotating the crankshaft with the coil and spark plug terminals disconnected from the ignition circuit
Flexlock with headed pintle and conical buttressing
In-situ ZSM-5 synthesis
Zoned ultraviolet curing system for printing press