Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement










Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.








 
 
  Recently Added Patents
Vending machine
Packaging
High power insulated gate bipolar transistors
Compositions and methods of vascular injury repair
Varying latency timers in a wireless communication system
Potentiometric-sensor chip, potentiometric assay, and assay kit
Non-phosphorus-based gellant for hydrocarbon fluids
  Randomly Featured Patents
Method to determine neighbor cell data in a mobile cellular system and a mobile station
Indirect extrusion press with ram-mounted turret supporting tooling
Light emitting device and method of manufacturing the same
Topical composition comprising feverfew
Multiple wash zone dishwasher
Fuel cell with proton conducting membrane with a pore size less than 30 nm
System for delivering conformal radiation therapy while simultaneously imaging soft tissue
Magnetic toy construction element
Amperometric sensor
Process for producing co-coated acicular magnetite particles