Resources Contact Us Home
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement

Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.

  Recently Added Patents
Integrated circuit testing with power collapsed
Method of fabricating semiconductor light emitting device
Method and apparatus for using virtual machine technology for managing parallel communicating applications
Delivery of captions, content advisory and other data through digital interface
Determination of copy number variations using binomial probability calculations
Lighting elements
Imaging apparatus having selection unit to select focus detection areas
  Randomly Featured Patents
Video display apparatus
Mounting system for an automobile cover
Exhaust gas purifying catalyst and process for preparing the catalyst
Voice recorder
Vehicle with a cabin encasement with internal reinforcing elements
Probe needle for vertical needle type probe card and fabrication thereof
Circuit devices and fabrication Method of the same
Encapsulated fiberglass mop handle
Method for handling harness wire
Cuff for air delivery tube