Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement










Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.








 
 
  Recently Added Patents
Transfer formulas
Digital broadcasting system and method of processing data in digital broadcasting system
Efficient relay automatic repeat request procedure in broadband wireless access system
Bi-directional pattern dependent noise prediction
Methods of producing the membranes and the uses of membranes as battery separator films
Method and apparatus for encoding and decoding video based on first sub-pixel unit and second sub-pixel unit
Cooler
  Randomly Featured Patents
Process for the production of finely divided and free-flowing powders of thermotropic polymers
Disc roller mechanism for forming helical shapes
Method for fabricating a chip scale package using wafer level processing
Polyfusion pipe repair system and method
Bulk sodium species treatment of thin film photovoltaic cell and manufacturing method
Printing apparatus and printing method
Holographic pump coupler and laser grating reflector
Targeted adenovirus vectors
Preceramic additives as fire retardants for plastics
Pour spout