Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement










Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.








 
 
  Recently Added Patents
Methods of establishing virtual circuits and of providing a virtual private network service through a shared network, and provider edge device for such network
Lighting control device and lighting control method
Network-based dynamic encoding
Image heating device
Toner for developing electrostatic charge image, electrostatic charge image developer, toner cartridge, process cartridge, image forming method, and image forming apparatus
Display system with mounting assemblies and associated methods
High-speed comparator with asymmetric frequency response
  Randomly Featured Patents
Element of a shoe upper
Input/output intercard connector
Robot cell safety system
Decoupled valve assembly and fuel injector using same
Silver halide photographic material with reduced fog and improved residual stain
Cut plug
Conference lighting fixture
Randomized thermometer-coding digital-to-analog converter and method therefor
Method for manufacturing a tapered stabilizer bar having a continuously changing cross-section
Cabinet handle