Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement










Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.








 
 
  Recently Added Patents
Magnetic resonance imaging apparatus
Two dimensional magnetic sensor immune to skew angle misalignment
Compositions of PD-1 antagonists and methods of use
Authentication for social networking messages
Semiconductor element-embedded wiring substrate
System for presenting media services
Charge pump and method of biasing deep N-well in charge pump
  Randomly Featured Patents
Dual supporting pivot thrust bearing apparatus
Front-load angiographic injector system, angiographic syringe and plunger for angiographic syringe
Composite next hops for forwarding data in a network switching device
Backup and archiving system by means of tape volume cassettes for data processing units
Image forming apparatus and fixing device used therein
Vehicle antenna
Message translations
Synchronous non-volatile memory system
Method for making a multilayered circuitized substrate
Apparatus for taking odontological or medical impressions