Resources Contact Us Home
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement

Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.

  Recently Added Patents
Display control device, display control method, and touchpad input system
Method and system for migrating object update messages through synchronous data propagation
Fabrication of thin pellicle beam splitters
Security authentication method, apparatus, and system
Redundant parallel operation of motor vehicle electrical system generators
Device and process for isolating and cultivating live cells on a filter or extracting their genetic material
System and method of error reporting in a video distribution network
  Randomly Featured Patents
Lottery ticket scraper or the like
Method for constructing a honeycomb extrusion die
Method and system of weighted context feedback for result improvement in information retrieval
Liquid cooling apparatus and method for cooling blades of an electronic system chassis
Method for fabricating solid tire having polyurethane foam core
Image reading-out apparatus
Method for treating human waste by solidification
Laser distance meter
Radially compressible blood control valve
Method and system for performing advanced object searching of a metadata repository used by a decision support system