Resources Contact Us Home
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement

Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.

  Recently Added Patents
Semiconductor device and method of adjusting characteristic thereof
Stable liquid VEGF antagonist formulations
Image signal processing apparatus and image signal processing method
Systems and methods for performing live chat functionality via a mobile device
Cavernous nerve stimulation via unidirectional propagation of action potentials
Image reading apparatus
Methods and apparatus to determine impressions using distributed demographic information
  Randomly Featured Patents
Aircraft based infrared mapping system for earth based resources
Audio teleconferencing
Device for producing bored piles
Piezoelectric multilayer component with stresses running perpendicular to stacking direction
Aerial trackway type tansportation system with improved speed controller
Skin balm dispensing unit
Rotary blood pump diagnostics and cardiac output controller
Portable telephone information visualizing device for visualizing information relating to portable telephone terminals
Revolving bookcase
Production of a video stream with synchronized annotations over a computer network