Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Exposure apparatus and method which synchronously moves the mask and the substrate to measure displacement










Image Number 17 for United States Patent #5844247.

There is disclosed an exposure method for transferring, using an optical system for illuminating a mask having patterns to be transferred on a substrate and a projection optical system for projecting images of the patterns to the substrate, the patterns to the substrate through the projection optical system by means of scanning the mask and the substrate synchronously relative to the projection optical system. The method comprises the steps of providing a plurality of measuring marks on the mask formed along a relative scanning direction, and providing a plurality of reference marks formed on the stage corresponding to the measuring marks, respectively, moving the mask and the substrate synchronously in the relative scanning direction to measure successively a displacement amount between the measuring marks on the mask and the reference marks, and obtaining a correspondence relation between a coordinate system on the mask and a coordinate system on the stage according to the displacement amount.








 
 
  Recently Added Patents
Toy
Upstream channel bonding in a cable communications system
Vehicle window opening and closing control device
Method of fabricating semiconductor light emitting device
Method for correcting integrating cavity effect for calibration and/or characterization targets
Guitar strap attachment means
Integrated transmit/receive switch
  Randomly Featured Patents
Method for internal combustion engine control using pressure ratios
Gas turbine power plant control apparatus having a multiple backup control system
Optical sensor
Output buffer with improved tolerance to overvoltage
Movable toy animal
Bowden cable
Cycloolefin purification method
Handwriting recognition by character template
Wireless system having a dynamically configured multimodal user interface based on user preferences
Management of bandwidth allocation in a network server