Resources Contact Us Home
Use of focused ion and electron beams for fabricating a sensor on a probe tip used for scanning multiprobe microscopy and the like

Image Number 3 for United States Patent #5838005.

Nanometer holes can be reliably and repeatedly defined in the tips of cantilevered probes and used in various types of scanning multiprobe microscopy by defining the hole within a layer disposed on the tip using focused electron or ion beams. The drilling of the hole on the apex of the tip and is stopped just as soon as the hole is defined through an overlying insulating layer under which lies a metallic or semiconductor layer at the apex. The hole is then backfilled with another metallic or semiconductor layer so that an active electrical junction is formed between the two layers through the hole in the insulating layer. The hole may be defined in conductive layers in various combinations with oxide layers, other metal layers and semiconductor materials to define Schottky diodes, thermocouple junctions, near-field optical detectors, and atomic force tips. As a result, two or more physical interactions may be simultaneously exploited between the fabricated tip and the scanned sample from which a scanned image may be produced.

  Recently Added Patents
Field emission cathode device and field emission display using the same
LED driving circuit, LED illumination appliance, LED illuminator, and LED illumination system
File management apparatus and file management apparatus controlling method
Electronic device assemblies
Printed circuit board unit having routing unit mounted thereon and computer device having the same
User-initiated quality of service modification in a mobile device
Sensor apparatus and information processing apparatus
  Randomly Featured Patents
Connector installation go/no-go test method
Linear motion clamping unit
Liquid crystal device having two bistable orientation states in the chiral smectic temperature range
Method of manufacturing mouldings
Boot for applying medicines
Capacitive strain gage and method
Parallel processing computer systems with reduced power consumption and methods for providing the same
Catalyst composition for copolymerizing ethylene
Electrical switch
Folding knife with handle pivoting mechanism