Resources Contact Us Home
Inductive plasma reactor

Image Number 14 for United States Patent #5811022.

A plasma reactor and methods for processing semiconductor wafers are described. Gases are introduced into a reactor chamber. An induction coil surrounds the reactor chamber. RF power is applied to the induction coil and is inductively coupled into the reactor chamber causing a plasma to form. A split Faraday shield is interposed between the induction coil and the reactor chamber to substantially block the capacitive coupling of energy into the reactor chamber which may modulate the plasma potential. The configuration of the split Faraday shield may be selected to control the level of modulation of the plasma potential. For etch processes, a separate powered electrode may be used to accelerate ions toward a wafer surface. For isotropic etching processes, charged particles may be filtered from the gas flow, while a neutral activated species passes unimpeded to a wafer surface.

  Recently Added Patents
Systems and methods for creating an animation sequence representative of a modeled condition
Method comprising co-crosslinking polyaniline, polymer acid and redox enzyme to produce polymeric matrix
Process for the dehydration of substituted 4-dimethylamino-2-aryl-butan-2-ol compounds and process for the preparation of substituted dimethyl-(3-aryl-butyl)-amine compounds by heterogeneo
Stacked memory device for a configurable bandwidth memory interface
Color electrophotographic image forming apparatus
Curable resin composition
Remote control device and method employing random addressing
  Randomly Featured Patents
Remotely installed steam generator nozzle dam system
Method and system for locking a page of real storage using a virtual address
Digital/analog converter, display device using the same, and display panel and driving method thereof
Developing agent and image forming apparatus using the same
Article of manufacture and method for tree shaped candle holder
Bead/paint spray gun
Antifuse circuit structure for use in a field programmable gate array and method of manufacture thereof
Electric incandescent lamp
Cerebral dilator
Latent catalysts, epoxy compositions incorporating same, and coating, impregnating and bonding methods employing the compositions