Resources Contact Us Home
Inductive plasma reactor

Image Number 14 for United States Patent #5811022.

A plasma reactor and methods for processing semiconductor wafers are described. Gases are introduced into a reactor chamber. An induction coil surrounds the reactor chamber. RF power is applied to the induction coil and is inductively coupled into the reactor chamber causing a plasma to form. A split Faraday shield is interposed between the induction coil and the reactor chamber to substantially block the capacitive coupling of energy into the reactor chamber which may modulate the plasma potential. The configuration of the split Faraday shield may be selected to control the level of modulation of the plasma potential. For etch processes, a separate powered electrode may be used to accelerate ions toward a wafer surface. For isotropic etching processes, charged particles may be filtered from the gas flow, while a neutral activated species passes unimpeded to a wafer surface.

  Recently Added Patents
System and method for providing a path avoidance feature in a network environment
Wireless updating of hearing devices
Method and system for remotely testing a wireless device
Antimicrobial flush solutions
Method and apparatus for providing spin-home function for mobile communication terminal
Floribunda rose plant named `KORamflusa`
Fabrication method of semiconductor device and fabrication method of dynamic threshold transistor
  Randomly Featured Patents
Information processing apparatus, control method for the same, program and storage medium
Video encoding and decoding apparatus
Semiconductor device and manufacturing method
Machine for removing skin from pieces of poultry
Siloxane based coating composition having excellent dyeabililty abrasion resistance, glossiness and transparency, and a preparation method thereof, and an optical lens coated by said coating c
Process for the preparation of ammonia
System for cooling the rotary engine rotor
Preceramic polymers derived from cyclic silazanes, and halosilanes and a method for their preparation