Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inductive plasma reactor










Image Number 14 for United States Patent #5811022.

A plasma reactor and methods for processing semiconductor wafers are described. Gases are introduced into a reactor chamber. An induction coil surrounds the reactor chamber. RF power is applied to the induction coil and is inductively coupled into the reactor chamber causing a plasma to form. A split Faraday shield is interposed between the induction coil and the reactor chamber to substantially block the capacitive coupling of energy into the reactor chamber which may modulate the plasma potential. The configuration of the split Faraday shield may be selected to control the level of modulation of the plasma potential. For etch processes, a separate powered electrode may be used to accelerate ions toward a wafer surface. For isotropic etching processes, charged particles may be filtered from the gas flow, while a neutral activated species passes unimpeded to a wafer surface.








 
 
  Recently Added Patents
Phone messaging using audio streams
Refuelable battery-powered electric vehicle
Secure device sharing
Image forming apparatus with enhanced display of guidance information
Navigation device, navigation method, and navigation program
Method and a channel estimating arrangement for performing channel estimation
Aluminum oxide coated cutting tool and method of manufacturing thereof
  Randomly Featured Patents
High contrast high thermal stability positive photoresists with mixed cresol and hydroxybenzaldehyde prepared novolak and photosensitive diazoquinone
Method of making semiconductor device
Athletic shoe
Geomorphs and variable resolution control of progressive meshes
Upper panel of a drink cup lid
Method of inhibiting neoplastic cells with isoquinoline derivatives
Interconnect run between a first point and a second point in a semiconductor device for reducing electromigration failure
Method and apparatus for transmitting signals having a carrier-interferometry architecture
Pharmaceutical compositions of 5-substituted uracil compounds
Floppy disc storage case